Abstract:To keep pace with the shrinkage of critical dimension, source and mask optimization (SMO) has emerged as a promising resolution enhancement technique to push the resolution of 193 nm argon fluoride immersion lithography systems. However, most current pixelated SMO approaches relied on scalar imaging models that are no longer accurate for immersion lithography systems with hyper-NA (NA>1). This paper develops a robust hybrid SMO (HSMO) algorithm based on a vector imaging model capable of effectively improving the robustness of immersion lithography systems to defocus and dose variations. The proposed HSMO algorithm includes two steps. First, the individual source optimization approach is carried out to rapidly reduce the cost function. Subsequently, the simultaneous SMO approach is applied to further improve the process robustness by exploiting the synergy in the joint optimization of source and mask patterns. The conjugate gradient method is used to update the source and mask pixels. In addition, a source regularization approach and source postprocessing are both used to improve the manufacturability of the optimized source patterns. Compared to the mask optimization method, the HSMO algorithm achieves larger process windows, i.e., extends the depth of focus and exposure latitude, thus more effectively improving the process robustness of 45 nm immersion lithography systems.

Global optimisation of source and mask in inverse lithography via tabu search combined with genetic algorithm.

Gradient-Based Source And Mask Optimization In Optical Lithography

Source and Mask Co-Optimization Using A Gradient Based Method in Optical Lithography

Multi-objective and multi-solution source mask optimization using NSGA-II for more direct process window enhancement

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Hybrid Source Mask Optimization for Robust Immersion Lithography.

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Robust Hybrid Source and Mask Optimization to Lithography Source Blur and Flare

Parametric Source-Mask-Numerical Aperture Co-Optimization for Immersion Lithography

Pixel-based Simultaneous Source and Mask Optimization for Resolution Enhancement in Optical Lithography

Ultra-Fast Source Mask Optimization via Conditional Discrete Diffusion

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DMD maskless lithography optimization based on an improved genetic algorithm