Abstract:Relevance. Vacuum-plasma methods of applying functional coatings are widely used to increase the reliability and durability of machine and mechanism parts, cutting tools, and technological equipment, as well as in modern micro- and nanoelectronics for applying conductive and dielectric layers of various thicknesses. The study presents a method of thermionic coating that combines in one technological cycle the processes of surface cleaning by a stream of low-energy ions and plasma electron beam evaporation of a substance under conditions of thermionic plasma formation. Aim. The research aims to determine the possibility of using the presented methodology to create and process functional coatings without radiation damage to the substrate surface. Methodology. The experimental studies were carried out in a plasma electron beam system with a primary plasma source based on an arc discharge with a filament cathode. The samples were diagnosed using a scanning electron microscope. Results. The ion current density from the primary plasma was investigated to determine the efficiency of the surface cleaning mechanism by ion bombardment. The dependences of the ionic current density on the initial parameters of the experiment were determined. The results of the treatment of the (TiZr/TiSi) N sample surface with a plasma ion stream are presented. The obtained scanning electron microscope images showed that such treatment leads to the cleaning of the surface layer from various contaminants without damage and creates a substrate for further thermionic deposition of a coating with a high degree of adhesion. The mechanism of thermionic deposition of a titanium monolayer on a stainless-steel substrate previously cleaned by ion bombardment was studied. The revealed order of magnitude higher values of the ionic current to the substrate during the formation of thermionic plasma indicate a significant increase in the rate of the deposition process and contribute to the formation of a high-quality ion-plasma coating. Conclusions. The scanning electron microscope images of the sample surface showed that the titanium coating during thermionic deposition was uniformly distributed over the substrate surface, without any droplet phase, which indicates the suitability of this technique for applying functional coatings without radiation damage to the substrate surface

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