Multiscale Modeling Of Surface Sputtering In A Scanning Transmission Electron Microscope

W. Lai,A. Barashev,D. Bacon
DOI: https://doi.org/10.1103/PhysRevB.70.195429
IF: 3.7
2004-01-01
Physical Review B
Abstract:A model to describe modification of surface shape and chemical composition of a specimen due to sputtering in a scanning transmission electron microscope is presented. It employs Monte Carlo simulation of electron trajectories, molecular dynamics modeling of individual sputtering events and continuum description of the evolution of surface geometry. Using this model the evolution of an initially flat {001} surface of a thin foil of Ni3Al is studied. The calculations show the formation of a hole in the foil and the time for perforation is found to be in excellent agreement with experiment. The sputter cross section of Al atoms is found to be much higher than that of Ni atoms, indicating preferential sputtering and small concentration of Al atoms at the surface. This, together with increasing surface area due to the hole formation, explains the preferential Al loss observed experimentally.
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