Methodical tuning of NH3 gas sensing in WO3 thin films by electron beam irradiation

Poornesh, P
DOI: https://doi.org/10.1007/s10854-024-12065-x
2024-02-11
Journal of Materials Science Materials in Electronics
Abstract:The present work focuses on the structure, morphology, optical and sensing analysis of Electron Beam Irradiation (EBI) treated WO 3 films synthesized by the spray pyrolysis technique. X-ray diffraction (XRD) revealed a slight shift in the 2θ position, indicating stress generated due to EBI process. Scanning Electron Microscopy (SEM) morphographs presented well-defined grains at higher irradiation dosages. X-ray Photoelectron Spectroscopy (XPS) studies showed increased oxygen vacancy defects for the 5 kGy treated sample compared to unirradiated WO 3 . Sensing analysis of unirradiated and EBI-treated films was conducted towards ammonia (NH 3 ) at an optimum operating temperature of 200 °C. Sensor response of 5 kGy treated film increased by − 4.5 fold compared to unirradiated film at 5 ppm NH 3 concentration. The current study demonstrates the importance of EBI in tailoring the NH 3 sensing properties of WO 3 films.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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