Structural and Optical Characteristic of Fe 10+ Ion Implanted Nanostructured WO 3 Film for Gas Sensing Application

Ashutosh Kumar,Shailendra Rajput,Sabyasachi Parida
DOI: https://doi.org/10.1149/2162-8777/ad9350
IF: 2.2
2024-11-29
ECS Journal of Solid State Science and Technology
Abstract:300 keV Fe 10+ ions with fluences of 1×10 15 , 3 × 10 16 , and 1 × 10 17 ions cm −2 were used to implant W O 3 films, developed by thermal evaporation method. After implantation, all samples were characterized for structural, morphological and optical study for gas sensing application. Furthermore, a thorough investigation and discussion of the gas sensing characteristics of pristine and Fe ion implanted W O 3 gas sensors was conducted. Dynamic gas-sensing performance were tested at room temperature for C H 4 gas at various concentrations of 50 ml min −1 , 100 ml min −1 , and 150 ml min −1 . Sensitivity of all gas sensors to C H 4 gas was calculated by the static gas response curve within and without methane environment. The obtained results indicate the Fe-ion implanted W O 3 gas sensor (1 × 10 17 ion/cm 2 ) possess better sensing properties than that of pure W O 3 films. This outcome might be related to the development of active sites and structural defects created by Fe ion implantation. These findings suggested that metal oxide sensitivity could be enhanced by ion implantation.
materials science, multidisciplinary,physics, applied
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