Abstract:Laser-assisted diamond machining provides a cost-effective approach for cutting hard and brittle materials. To expand its practical application, a comprehensive understanding of the design methodology of the laser-assisted diamond machining system and optimization of process parameters for machining single crystal silicon is crucial. This study presents, for the first time, an optical design methodology, with a particular emphasis on the design method for diamond cutting tools. The adequacy of the proposed method is verified through optical simulation. The numerical analysis indicates that the incident surface of the diamond cutting tool should be positioned within the Rayleigh range of the laser beam, and the optimal laser incident height is determined to be 0.7 mm. Furthermore, high-temperature nanoindentation tests reveal a significant reduction in the hardness of single crystal silicon by 72.04 % and a reduction in Young's modulus by 30.70 % at a temperature of 600 °C due to increased dislocation activity. Orthogonal experiments based on the Taguchi method reveal that the feed speed has the most significant impact on the resultant force during laser-assisted diamond machining of single crystal silicon. The contribution rates of spindle speed, feed speed, cutting depth, and laser power to the resultant force are determined to be 31.47 %, 35.82 %, 22.02 %, and 8.04 % respectively. A regression model is established through multiple nonlinear regression analysis to quantify the correlation between the input parameters and the resultant force. The optimal parametric combination is determined using nonlinear programming optimization, resulting in a spindle speed of 3061.45 rpm, a feed speed of 4 mm/min, a cutting depth of 4 μm, and a laser power of 1.5 W. Validation experiments demonstrate that the established mathematical regression model accurately forecasts the resultant force.

Optimization of the Femtosecond Laser Machining Process for Single Crystal Diamond Using Response Surface Methodology

Controllable Diamond Cutting of Structured Surfaces with Subnanometric Height Features on Silicon

Femtosecond Laser Micro-Machining of Three-Dimensional Surface Profiles on Flat Single Crystal Sapphire

Investigation on system design methodology and cutting force optimization in laser-assisted diamond machining of single-crystal silicon

Precision Machining of Single Crystal Diamond Cutting Tool Via Picosecond Laser Irradiation

Micro-grooves Machining and Optimizing on SiC/SiC Composites by Femtosecond Laser-Based on Response Surface Methodology

Thermal analysis of in-situ laser assisted diamond cutting of fused silica and process optimization

Experimental investigations on the laser-assisted machining of single crystal Si for optimal machining

Ultra-short pulsed laser processing of single crystalline diamonds for tooling applications

Optimization of multistage femtosecond laser drilling process using machine learning coupled with molecular dynamics

Micro-channels Machining on Polycrystalline Diamond by Nanosecond Laser

Investigating Anisotropic Effects and Optimizing Parameters in Ultra-Short Pulsed (USP) Laser Machining of Single Crystalline Diamond (SCD)

Analysis of the machining performance and surface integrity in laser milling of polycrystalline diamonds

Experimental Investigation of the Machinability of Single Crystal Silicon in Laser-Assisted Diamond Cutting

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

The Influence of the Ionization Regime on Femtosecond Laser Beam Machining Mono-Crystalline Diamond

Experimental investigation and optimization of femtosecond laser processing parameters of silicon carbide–based on response surface methodology

Design of a Femtosecond Laser Percussion Drilling Process for Ni-Based Superalloys Based on Machine Learning and the Genetic Algorithm

Cryogenic assisted femtosecond laser ablation of polycrystalline diamond

Process Research on Micro-Machining Diamond Microgroove by Femtosecond Laser

Ablation mechanism investigation and ablation threshold prediction of single crystal diamond irradiated by femtosecond laser