A Process Research for Integrated RF Tunable Filter
Haixia Zhang,Ming Li,Dacheng Zhang,Norman C. Tien
DOI: https://doi.org/10.1109/nems.2006.334786
2006-01-01
Abstract:Due to the research work has been done in RF MEMS fields for more than 10 years, RF lumped elements, like inductor, tunable capacitor, CPW line and switch, are developed very well, and studied deeply. But for its wireless application, integrated tunable RF net work, which composed by these lumped elements are much more important and useful, especially in high and medium frequency system, high performance and low lost low-pass, band-pass filter, impedance match net work have widen application, especially, RF tunable filters will be a big benefit for the system. In this paper, we put forward our effort in fabrication research in such an integrated tunable filters, applying glass substrate for RF inductor, CPW line and MIM capacitors, using anodic bonding to integrate glass and silicon wafer, and then fabrication bulk structure of tunable capacitor and switch by DRIE, to be a tunable system. This process gives capability to make different tunable RF network in GHz wireless system