Design and simulation of variable LC tank based on MEMS technology for multi band applications

Davoud Razaghpour,Mir Majid Ghasemi,Amir Fathi

DOI: https://doi.org/10.1007/s00542-024-05798-6

2024-11-10

Microsystem Technologies

Abstract:A new tunable LC tank for multiband frequency applications based on micro-electro-mechanical systems (MEMS) is presented in this paper. The designed LC tank is working in the frequency range from 1.2 to 2.9 GHz which is suitable for UHF band applications. In the proposed filter, inductor and capacitor elements are tunable with tunability ranges of 83% and 261%, respectively. The total tunability range of the structure is 237%, which is high. The proposed structure utilizes the floating technique, which leads to high quality factor. The maximum quality factors of the inductor and capacitor are 101 and 232, respectively, and the maximum total quality factor is 70. The Power consumption of the structure is nearly zero due to the use of electrostatic actuation. The equivalent circuit of the proposed LC is extracted from the model, and its functionality is evaluated in a multiband VCO, and is compared with an extracted LC model in the 0.18 CMOS library. The phase noise of the VCO with the proposed LC tank is −101 dBc at frequency of 2.3 GHz (∆f = 10 kHz). The dimension of the proposed structure is 1.3 mm × 2 mm with an electrostatic actuation mechanism and is designed based on standard Metal Mumps fabrication process trademark of MEMSCAP.

engineering, electrical & electronic,materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied