Abstract:Micro-light emitting diodes (Micro-LEDs) based on III-nitride semiconductors have become a research hotspot in the field of high-resolution display due to its unique advantages. However, the edge effect caused by inductively coupled plasma (ICP) dry etching in Micro-LEDs become significant with respect to the decreased chip size, resulting in a great reduction in device performance. In this article, sector-shaped GaN-based blue Micro-LEDs are designed and fabricated. Additionally, the device performance of different size Micro-LEDs with passivation are investigated with respect to those without passivation. Several methods have been applied to minimize the etching damage near the edge, including acid-base wet etching and SiO2 passivation layer growth. The room temperature photoluminescence (PL) results demonstrate that the light emission intensity of Micro-LEDs can be significantly enhanced by optimized passivation process. PL mapping images show that the overall luminescence of properly passivated Micro-LEDs is enhanced, the uniformity is improved, and the effective luminescence area is increased. The recombination lifetime of carriers in Micro-LEDs are increased by the usage of passivation process, which proves the reduction in non-radiative recombination centers in Micro-LEDs and improved luminescence efficiency. As a result, the internal quantum efficiency (IQE) is improved from 14.9% to 37.6% for 10 μm Micro-LEDs, and from 18.3% to 26.9% for 5 μm Micro-LEDs.

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