Abstract:Pulsed DC magnetron sputtering was used to deposit indium‑tin-oxide (ITO) thin films on glass substrates for application in photovoltaic devices as the final window layer. The evolution of crystal phase, morphology, resistivity and transmittance of the ITO films under different thermal annealing procedure (in-situ annealing versus post-annealing) at relatively low temperatures (up to 300°C) were studied. Fully crystalline ITO films with low sheet resistance of 24Ω/□ and high average transmittance (exclude glass substrate) of 90.10% with a Haacke's figure of merit 1.47×10−2Ω−1 were obtained by in-situ annealing at 200°C. In comparison, the minimum temperature observed to fully crystalize the ITO thin films with competitive crystallinity, electrical and optical properties by post-annealing was 250°C. The corresponding post-annealed 300nm thick films showed sheet resistance of 49Ω/□ and average transmittance (exclude glass substrate) as high as 91.93% with a Haacke's figure of merit 0.882×10−2Ω−1. The surface morphology of the as-deposited ITO films remained homogeneous after post-annealing whereas large particles (up to 100nm) were observed on the surface of the films deposited by in-situ annealing. The results indicated that different thermal treatment procedures at lower temperatures produce significant effect on the electrical, optical and other physical properties of the ITO thin films which are critical for the window layer in photovoltaics.

Preparation and characterization of hollow spherical indium tin oxide with micro size by template assisted hydrothermal method

Preparation of Ultra-Fine Indium Tin Oxide Powders with High Specific Surface Areas by Co-Precipitation Method

InOOH Hollow Spheres Synthesized by a Simple Hydrothermal Reaction.

Preparation of Nano-Powders of ITO

Preparation of Indium-Tin Oxide (ITO) Aciculae by a Novel Concentration-Precipitation and Post-Calcination Method

Preparation and Characterization of Nanosize Indium-Tin-Oxide Powder by Chemical Co-precipitation

Preparation And Hydrogen Sensing Properties Of Ito Nanotubes By Sol-Gel Method Combined With Porous Anodic Aluminum Oxide Template

Preparation and Sintering Behavior of the Tin-Doped Indium Oxide Nanopowders: Rapid Communications of the American Ceramic Society

Synthesis of Tin-Doped Indium Oxide Nanoparticles by an Ion-Exchange and Hydrothermal Process

Synthesis of 3D Ordered Macroporous Indium Tin Oxide Using Polymer Colloidal Crystal Template

Optimization Preparation of Indium Tin Oxide Nanoparticles via Microemulsion Method Using Orthogonal Experiment

Template synthesis of tin-doped indium oxide (ITO)/polymer and the corresponding carbon composite hollow colloids

Shape-Controlled Synthesis of Porous Screw-Cap-Like Indium Tin Oxide and Its Application for Gas Sensing

Effect of Different Thermo-Treatment at Relatively Low Temperatures on the Properties of Indium‑tin-Oxide Thin Films

Preparation of Nano-sized Powder of Indium Tin Oxide (ITO)

Preparation and characterization of ITO nano-powders by microwave-assisted co-precipitation in aqueous phase

Monodispersed Tin Doped Indium Oxide Nanometer Powders Prepared by Hydrothermal Method

Preparation of Monodispersed Tin-Doped Indium Oxide Nanopowders under Moderate Conditions

Preparation of extraordinary high-density indium-tin oxide target on the basis of pressure-less sintering method

Characterization and preparation of ITO thin film from hydrothermal and sol-gel process

Aqueous Deposition of Ultraviolet Luminescent Columnar Tin‐Doped Indium Hydroxide Films