Abstract:As one of the most widely used characterization tools in materials science, (scanning) transmission electron microscopy ((S)TEM) has the unique ability to directly image specimens with atomic resolution. Compared to diffraction-based techniques, the main advantage of (S)TEM imaging is that in addition to the periodic average structures of crystalline materials, it can be used to probe nonperiodic local structures such as surfaces, interfaces, dopants, and defects, which have crucial impacts on material properties. However, many crystalline materials are extremely sensitive to electron beam irradiation, which can only withstand dozens (or even fewer) of electrons per square angstrom before they undergo structural damage. Although using electron doses lower than the thresholds can in principle preserve their structures, the thus acquired images are too noisy to be useful. Consequently, high-resolution imaging of the inherent structures of such electron beam-sensitive materials using (S)TEM is a long-standing challenge. In recent years, the advances in electron detectors and image-acquisition methods have enabled high-resolution (S)TEM with ultralow electron doses, largely overcoming this challenge. A series of highly electron beam-sensitive materials that are traditionally considered impossible to be imaged with (S)TEM, including metal organic frameworks (MOFs), covalent organic frameworks (COFs), organic-inorganic hybrid halide perovskites, and supramolecular crystals, have been successfully imaged at atomic resolutions. This technological advance has greatly expanded the application range of electron microscopy. This Account focuses on our recent works pertaining to the high-resolution imaging of electron beam-sensitive materials using very low electron doses. We first explain that the use of direct-detection electron-counting (DDEC) cameras provides the hardware basis for successful low-dose high-resolution TEM (HRTEM). Subsequently, we introduce a suite of methods to address the challenges peculiar to low-dose HRTEM, including rapid search for crystal zone axes, precise alignment of the image stack, and accurate determination of the defocus value. These methods, combined with the use of a DDEC camera, ensure efficient imaging of electron beam-sensitive crystalline materials in the TEM mode. Moreover, we demonstrate that integrated differential phase contrast STEM (iDPC-STEM) is an effective method for acquiring directly interpretable atomic-resolution images under low-dose conditions. In addition, we share our views on the great potential of four-dimensional STEM (4D-STEM) in imaging highly electron beam-sensitive materials and provide preliminary simulation results to demonstrate its feasibility. Finally, we discuss the significance of developing (S)TEM specimen preparation techniques applicable for sensitive materials and the advantages of using the cryogenic focused ion beam (cryo-FIB) technique for this purpose.

Simplification of selective imaging of dislocation loops: diffraction-selected on-zone STEM

STEM Characterization of Dislocation Loops in Irradiated FCC Alloys

Identifying Dislocations and Stacking Faults in Gan Films by Scanning Transmission Electron Microscopy

3D reconstruction of the spatial distribution of dislocation loops using a triangulation approach

Synergistic Effects of Anisotropy and Image Force on TEM Diffraction Contrast of Dislocation Loops

Simulations of Weak-Beam Diffraction Contrast Images of Dislocation Loops by the Many-Beam Schaeublin–Stadelmann Equations

A New Insight into Largely Defocused HAADF-STEM Imaging and Visualization of Strain Field

TEM-based dislocation tomography: Challenges and opportunities

Observation and quantitative analysis of dislocations in steel using electron channeling contrast imaging method with precise control of electron beam incident direction

In Situ TEM and Multiscale Study of Dislocation Loop Formation in the Vicinity of a Grain Boundary

Characterization of extended defects in 2D materials using aperture-based dark-field STEM in SEM

Fundamental and experimental aspects of diffraction for characterizing dislocations by electron channeling contrast imaging in scanning electron microscope

Direct Visualization of Local Electromagnetic Field Structures by Scanning Transmission Electron Microscopy

Three-dimensional imaging of individual point defects using selective detection angles in annular dark field scanning transmission electron microscopy

Enhancement of low-spatial-frequency components by a new phase-contrast STEM using a probe formed with an amplitude Fresnel zone plate

Application of scanning electron diffraction in the transmission electron microscope for the characterisation of dislocations in minerals

Systematic row and zone axis STEM defect image simulations

Accurate quantification of dislocation loops in complex functional alloys enabled by deep learning image analysis

Transmission Electron Microscopy Characterization of Dislocation Loops in Irradiated Zirconium

Imaging, Core-Loss, and Low-Loss Electron-Energy-Loss Spectroscopy Mapping in Aberration-Corrected STEM

Low-Dose Electron Microscopy Imaging of Electron Beam-Sensitive Crystalline Materials