Abstract:We present a new, robust three dimensional microfabrication method for highly parallel microfluidics, to improve the throughput of on-chip material synthesis by allowing parallel and simultaneous operation of many replicate devices on a single chip. Recently, parallelized microfluidic chips fabricated in Silicon and glass have been developed to increase the throughput of microfluidic materials synthesis to an industrially relevant scale. These parallelized microfluidic chips require large arrays (>10,000) of Through Silicon Vias (TSVs) to deliver fluid from delivery channels to the parallelized devices. Ideally, these TSVs should have a small footprint to allow a high density of features to be packed into a single chip, have channels on both sides of the wafer, and at the same time minimize debris generation and wafer warping to enable permanent bonding of the device to glass. Because of these requirements and challenges, previous approaches cannot be easily applied to produce three dimensional microfluidic chips with a large array of TSVs. To address these issues, in this paper we report a fabrication strategy for the robust fabrication of three-dimensional Silicon microfluidic chips consisting of a dense array of TSVs, designed specifically for highly parallelized microfluidics. In particular, we have developed a two-layer TSV design that allows small diameter vias (d < 20 µm) without sacrificing the mechanical stability of the chip and a patterned SiO2 etch-stop layer to replace the use of carrier wafers in Deep Reactive Ion Etching (DRIE). Our microfabrication strategy allows >50,000 (d = 15 µm) TSVs to be fabricated on a single 4" wafer, using only conventional semiconductor fabrication equipment, with 100% yield (M = 16 chips) compared to 30% using previous approaches. We demonstrated the utility of these fabrication strategies by developing a chip that incorporates 20,160 flow focusing droplet generators onto a single 4" Silicon wafer, representing a 100% increase in the total number of droplet generators than previously reported. To demonstrate the utility of this chip for generating pharmaceutical microparticle formulations, we generated 5-9 µm polycaprolactone particles with a CV < 5% at a rate as high as 60 g/hr (>1 trillion particles/hour).

Fabrication of Embedded Microfluidic Chips with Single Micron Resolution Using Two‐Photon Lithography

Digital light processing 3D printing for microfluidic chips with enhanced resolution via dosing- and zoning-controlled vat photopolymerization

3D Nanofabrication inside rapid prototyped microfluidic channels showcased by wet-spinning of single micrometre fibres

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon

3D Printing of Individualized Microfluidic Chips with DLP-Based Printer

Embellishment of Microfluidic Devices Via Femtosecond Laser Micronanofabrication for Chip Functionalization

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Rapid Micromolding of Sub-100 µm Microfluidic Channels Using an 8K Stereolithographic Resin 3D Printer

Direct laser writing-enabled 3D printing strategies for microfluidic applications

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

High-resolution low-cost LCD 3D printing of microfluidics

Scalable, Transparent and Micro: 3D Printed Rapid Tooling for Injection Moulded Microfluidics

Multi-Resin Masked Stereolithography (MSLA) 3D Printing for Rapid and Inexpensive Prototyping of Microfluidic Chips with Integrated Functional Components

Digital light processing 3D printing of microfluidic devices targeting high-pressure liquid-phase separations

Fabrication of Chemofluidic Integrated Circuits by Multi-Material Printing

High-resolution low-cost LCD 3D printing for microfluidics and organ-on-a-chip devices

Achieving High-Precision, Low-Cost Microfluidic Chip Fabrication with Flexible PCB Technology

Multistep liquid-phase lithography for fast prototyping of microfluidic free-flow-electrophoresis chips

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

High-accuracy DLP 3D printing of closed microfluidic channels based on a mask option strategy