Abstract:Micro-electro-mechanical system (MEMS) based mass spectrometry, MEMS mass spectrometry, emerges a new technique branch of miniature mass spectrometry. One of the main challenges hindering the development of MEMS mass spectrometry is the poor compatibility between the complex electrode structure of traditional ion optics and MEMS processes. This paper proposed a planar quadrupole mass filter utilizing a highly simplified stacked-layer structure and film electrodes, which is easy to fabricate with high precision by MEMS surface micromachining. The ion trajectory simulation model of the MEMS mass spectrometry chip involving all necessary ion optics was elaborated for investigating the preliminary performance of the planar quadrupole mass filter. By optimizing the crucial parameters such as the frequency of radio frequency voltage, the ratio of direct current voltage and radio frequency voltage, pre-pole length, main-pole length, and injection kinetic energy, the preliminary simulation result of planar quadrupole mass filter achieved a 1∼2Da peak width (at 50% of peak height) and 20∼80% ion transmission efficiency. Importantly, the planar quadrupole mass filter demonstrated a maximum working pressure of 0.1 Pa (using air as the buffer gas), 100 times higher than that of conventional quadrupole mass filters, while maintaining a 0.7∼1.8 Da peak width and ∼5% ion transmission efficiency. Additionally, to modify the theoretical formulas for the non-ideal quadrupolar field of planar quadrupole mass filter, a novel approach based on stability diagrams obtained by simulation was also introduced. The pretty good linearity (R 2 =1) between ion masses in the range of 10 to 100Da and the corresponding radio frequency voltages was verified through the simulated mass spectra. Notably, the proportional coefficient of ion mass and radio frequency voltage exhibited a minimal 4% deviation between the simulated value (4.7132 V 0P /Da) and the calculated value (4.9036 V 0P /Da) through the modified formula. In conclusion, the preliminary simulation results demonstrated that the planar quadrupole mass filter possessed moderate performance, high-pressure tolerance, and excellent theoretical consistency, which proved it a promising technology of MEMS mass spectrometry. It can find applications in the fields of gas detection, including the rapid response to hazardous gas emissions and in situ detection of dissolved gases in the deep sea.

Increasing Isolation Efficiency Using a Segmented Quadrupole Mass Filter Operated with Rectangular Waveforms

Mass-selective removal of ions from Paul traps using parametric excitation

Mass Peak Shape Improvement of A Quadrupole Mass Filter when Operating with A Rectangular Wave Power Supply

Mass Selection of Ions from Beams Using Waveform Isolation in Radiofrequency Quadrupoles

Possibility of operating quadrupole mass filter at high resolution

Quadrupole mass filters with octopole fields.

A Novel Quadrupole Mass Filter Based On Rectangular Electrodes

Simulation of a Quadrupole Mass Filter with Octupole Field

Dipole and quadrupole resonance excitation in linear quadrupoles

Simulation Study of a Planar Quadrupole Mass Filter for MEMS Mass Spectrometer

Mass filter with phase modulation of radio frequency voltage

Low-Vacuum Quadrupole Mass Filter Using a Drift Gas

Simulation study of digital waveform‐driven quadrupole mass filter operated in higher stability regions for high‐resolution inductively coupled plasma mass spectrometry

Compact High Isolation Quad-Band Bandpass Filter Using Quad-Mode Resonator

Development of quadrupole mass spectrometers using rapid prototyping technology

Square Parametric Excitation: A Digital Resonant Method for the Quadrupole Ion Trap

Study of a Micro Chamber Quadrupole Mass Spectrometer

Two stability islands of quadrupole mass filter near q = 0.9 created by auxiliary radio frequency voltage.

Analysis of high mass-to-charge ions in a quadrupole ion trap mass spectrometer via an end-cap quadrupolar direct current downscan

Characterization of an Improved Thermal Ionization Cavity Source for Mass Spectrometry

The High-Efficiency Calculation and Analysis of Different Quadrupole Fields Based on the Method of Fundamental Solution.