Abstract:Micro-electro-mechanical system (MEMS) based mass spectrometry, MEMS mass spectrometry, emerges a new technique branch of miniature mass spectrometry. One of the main challenges hindering the development of MEMS mass spectrometry is the poor compatibility between the complex electrode structure of traditional ion optics and MEMS processes. This paper proposed a planar quadrupole mass filter utilizing a highly simplified stacked-layer structure and film electrodes, which is easy to fabricate with high precision by MEMS surface micromachining. The ion trajectory simulation model of the MEMS mass spectrometry chip involving all necessary ion optics was elaborated for investigating the preliminary performance of the planar quadrupole mass filter. By optimizing the crucial parameters such as the frequency of radio frequency voltage, the ratio of direct current voltage and radio frequency voltage, pre-pole length, main-pole length, and injection kinetic energy, the preliminary simulation result of planar quadrupole mass filter achieved a 1∼2Da peak width (at 50% of peak height) and 20∼80% ion transmission efficiency. Importantly, the planar quadrupole mass filter demonstrated a maximum working pressure of 0.1 Pa (using air as the buffer gas), 100 times higher than that of conventional quadrupole mass filters, while maintaining a 0.7∼1.8 Da peak width and ∼5% ion transmission efficiency. Additionally, to modify the theoretical formulas for the non-ideal quadrupolar field of planar quadrupole mass filter, a novel approach based on stability diagrams obtained by simulation was also introduced. The pretty good linearity (R 2 =1) between ion masses in the range of 10 to 100Da and the corresponding radio frequency voltages was verified through the simulated mass spectra. Notably, the proportional coefficient of ion mass and radio frequency voltage exhibited a minimal 4% deviation between the simulated value (4.7132 V 0P /Da) and the calculated value (4.9036 V 0P /Da) through the modified formula. In conclusion, the preliminary simulation results demonstrated that the planar quadrupole mass filter possessed moderate performance, high-pressure tolerance, and excellent theoretical consistency, which proved it a promising technology of MEMS mass spectrometry. It can find applications in the fields of gas detection, including the rapid response to hazardous gas emissions and in situ detection of dissolved gases in the deep sea.

Mass Peak Shape Improvement of A Quadrupole Mass Filter when Operating with A Rectangular Wave Power Supply

Quadrupole mass filters with octopole fields.

Mass-selective removal of ions from Paul traps using parametric excitation

Mass filter with phase modulation of radio frequency voltage

Development of Microwave Plasma Torch Mass Quadrupole Spectrometer

Increasing Isolation Efficiency Using a Segmented Quadrupole Mass Filter Operated with Rectangular Waveforms

Possibility of operating quadrupole mass filter at high resolution

Dipole and quadrupole resonance excitation in linear quadrupoles

Two stability islands of quadrupole mass filter near q = 0.9 created by auxiliary radio frequency voltage.

Simulation of a Quadrupole Mass Filter with Octupole Field

A Novel Quadrupole Mass Filter Based On Rectangular Electrodes

Simulation Study of a Planar Quadrupole Mass Filter for MEMS Mass Spectrometer

Mass Selection of Ions from Beams Using Waveform Isolation in Radiofrequency Quadrupoles

Reducing Mass Peak Instability Caused by the Phase Changes of Rf and Ac Signals in A Rectilinear Ion-Trap Analyzer

Simulation study of digital waveform‐driven quadrupole mass filter operated in higher stability regions for high‐resolution inductively coupled plasma mass spectrometry

Square Parametric Excitation: A Digital Resonant Method for the Quadrupole Ion Trap

Experimental Evaluation of Higher Order Stability Zones Using a Digitally Operated Quadrupole Mass Filter

Linear Quadrupoles with Added Hexapole Fields

Application and Development of Quadrupole Electrode System in Mass Spectrometry

Tandem RF-only quadrupole mass filter with quadrupolar excitation

Field tuning and rf measurements of the four-vane radio frequency quadrupole with ramped inter-vane voltage