Abstract:A novel laser‐based modification of aluminum nitride (AlN) ceramic allows concurrent surface passivation (arresting degradation due to hydrolysis) and surface wettability modulation. The methodology allows integration of the non‐oxide ceramic in sealed, heat‐spreading vessels intended for thermal management of high‐performance electronics. A wick‐free vapor chamber is demonstrated, showing promise for direct‐to‐chip cooling and other high‐temperature applications relying on phase‐change heat transfer. Aluminum nitride (AlN), a versatile ceramic with high thermal conductivity, high electrical resistivity, and a coefficient of thermal expansion compatible with silicon, is well‐suited for direct‐to‐chip cooling applications of electronics, implementation in wide bandgap semiconductors, and for high‐temperature heat exchangers. Despite multiple advantages, AlN's implementation in liquid‐cooling applications is often hindered by surface‐degrading effects of working‐fluid‐induced hydrolysis. Herein, a scalable ‐but highly tunable‐ wettability engineering approach is introduced, that allows effective implementation of bulk AlN substrates in enhanced two‐phase cooling of electronics. The approach prevents hydrolysis of AlN by aqueous media and establishes control over surface roughness, all the while maintaining bulk integrity and material properties of the underlying substrate. Demonstration of the new approach is presented in spontaneous, pumpless, surface liquid transport, a necessity if such ceramics are to play an integral role as components of sealed, phase‐change, wickless thermal‐management devices (e.g., vapor chambers or heat pipes) that require rapid working‐fluid transport in their multi‐phase interior. The novelty of this work lies in establishing a scalable methodology for utilizing and further enhancing the properties of this non‐oxide ceramic material for phase‐change heat‐transfer hermetic devices, thereby paving the way toward the implementation of this intriguing material in next‐generation heat spreaders.

The surface softening mechanism of AlN ceramic by laser treatment

Experimental Investigation of Aluminum Nitride Ceramics Based on Compliant Finishing Process

Investigation on the Microstructure and Mechanical Behaviors of a Laser Formed Nb-Ti-Al Alloy

Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation

Aluminium Nitride Surface Characterization by Grinding with Laser-Ultrasonic Coupling

Surface damage characteristics of AlN ceramics induced by ultra-precision grinding

Laser‐Tuned Surface Wettability Modification and Incorporation of Aluminum Nitride (AlN) Ceramics in Thermal Management Devices

Direct nanosecond laser metallization of AlN ceramics

Flame-Assisted Laser Polishing of Alumina Ceramic Surface Properties

Alpha-to-gamma phase transformation self-reinforcing of Alumina Ceramic Slit Array in Nd:YAG Laser Cutting Based on Vapor-to-melt Ratio Controlling

Crystallographic and morphological textures in laser surface modified alumina ceramic

Alpha alumina synthesis by laser treatment of bi-phasic nanowires

Surface Treatment of Alumina-Based Ceramics Using Combined Laser Sources

Ablation and surface structuring of Si3N4 ceramics by nanosecond laser pulses

Melt-grown behaviour of heat treated high-purity alumina ceramics prepared by laser directed energy deposition

Effect of process parameters on surface formation in laser welding of Al2O3 ceramic

Toughening effect and mechanisms of AlN whiskers on a low‐temperature sintered AlNw/AlN ceramics

New Laser Machining Technology of Al2O3 Ceramic with Complex Shape

Investigation of mechanism and surface morphology on the femtosecond laser ablation of silicon nitride under different auxiliary processing environments

Influence of AlN(0001) Surface Reconstructions on the Wettability of an Al/AlN System: A First-Principle Study

Mechanical and thermal properties of in situ AlN/Al-12Si composite fabricated by laser powder bed fusion