Ethanol and Acetone Gas Sensor Properties of Porous Silicon Based on Resistance Response

Emad Moghimi,Mohammad Esmaeil Azim Araghi
DOI: https://doi.org/10.1007/s12633-023-02607-z
IF: 3.4
2023-08-05
Silicon
Abstract:Based on importance of porous silicon in nearly all physical and chemical properties such as mechanical, electrical, and optical on one hand and its application in optoelectronic devices on the other hand, we decided to plan and construction a setup to receive a proper porous silicon in the case of uniformity in diameter and depth of pores which was confirmed by FESEM measurements. Using AFM images, topography parameters and fractal dimensions were calculated and compared. Optical band gap of silicon and porous silicon was compared. The prepared samples were applied to use as a gas sensor to exposure of ethanol and acetone vapors from 100 to 400 ppm. Interesting results of application of fabricated samples has been reported in result section.
materials science, multidisciplinary,chemistry, physical
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