Strain-induced polarization modulation at GaN/Ti interface for flexible thin-film sensor

Renfeng Chen,Kaixuan Chen,Junxue Ran,Yijian Song,Xiaodong Qu,Kewei Yang,Xiaoli Ji,Junxi Wang,Tongbo Wei
DOI: https://doi.org/10.1088/1361-6641/ad54e8
IF: 2.048
2024-06-08
Semiconductor Science and Technology
Abstract:We have presented an effective piezoelectric polarized interface modulation at GaN/Ti Schottky structure and fabricated a flexible GaN-based sensor using double-transfer method. Chemical etching of Ni sacrificial layer is proved to remove the temporary substrate without metal electrodes damages. The fabricated flexible GaN-based sensor with top and bottom Ti metal Schottky contact exhibits current on/off characteristic under external strain, whose current shows a 53.9% reduction by 2.3% tensile strain and a 67.8% enhancement by -2.3% compressive strain at 5V bias voltage. It is found that the light/dark current ratio in the GaN/Ti Schottky junction significantly increases near zero-bias voltage under 2.3% tensile strain, probably indicating the enhanced built-in piezoelectric polarized field at the interface. This work promotes the study of flexible sensor based on wurtzite III-V nitrides for wearable electronics and optoelectronics.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter
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