Piezo-resistive pressure sensor based on CVD-grown ZnO nanowires on Polyethylene Tetrathalate substrate

Manisha Kumari,Rakesh K. Prasad,Manish K. Singh,Parameswar K. Iyer,Dilip K. Singh
2023-06-16
Abstract:Recent developments in the domain of electronic materials and devices have attracted the interest of researchers toward flexible and printable electronic components like organic transistors, printable electrodes and sensors. Zinc Oxide (ZnO) nanowires (NWs) possess a number of excellent properties like high mobility, large exciton binding energy and the direct-band gap in addition to large piezoelectric coefficients. Here, we report on flexible piezo-resistive sensor based on Indium tin oxide (ITO)-coated Polyethylene tetrathalate (PET) substrate. The device shows sensitivity in terms of change in resistance from 100 {\Omega} to 2.4 K{\Omega} at an applied potential of 5V upon bending from flat to 95 degrees. The 1-D nanowire flexible device in its flat state shows saturated output current. We observed ten folds enhanced variation as compared to previous reports. Improved sensitivity was observed in our experiments due to fewer defects in CVD-grown NWs as compared to others where hydrothermally grown nanowires were used. The methodology of device fabrication reported here requires less time and enables efficient devices for the realization of flexible and wearable technology.
Instrumentation and Detectors,Materials Science,Applied Physics
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to develop a flexible piezoresistive pressure sensor based on zinc oxide (ZnO) nanowires grown by chemical vapor deposition (CVD). Specifically, the researchers aim to use CVD technology to grow high - quality ZnO nanowires on polyethylene terephthalate (PET) substrates and apply them to flexible electronic devices, such as wearable health monitoring technologies and human - machine interfaces. This sensor can sense external stimuli and has self - powered characteristics, that is, it can work without an external power source. The focus of the research is to improve the sensitivity of the sensor by reducing the defects in the nanowires, so that the resistance change in the bent state is significantly enhanced, showing better performance than previously reported. In addition, this study also proposes a simple and efficient device manufacturing method, which is suitable for large - scale production and practical applications.