Investigation of Static and Dynamic Characteristics of an Electrostatically Actuated Rectangular Microplate with Axial Internal Stress and Transverse Pressure

Shivdayal Kumar,Anand Bhushan
DOI: https://doi.org/10.1007/s42417-022-00602-z
2022-07-12
Journal of Vibration Engineering & Technologies
Abstract:PurposeIn this paper, interactions of two critical components—axial internal stress and transverse pressure—of a microplate sensor have been investigated. Static and dynamic characteristics of an electrostatically actuated rectangular microplate have been investigated to understand the effects of axial internal stress and transverse pressure.MethodThe microplates have been modelled using Kirchhoff’s plate theory along with von Karman nonlinearity. Galerkin principle is used to derive the reduced order model of the governing partial differential equation of motion.ResultsThe effects of the simultaneous presence of internal stress and transverse pressure on pull-in parameters and resonance frequency characteristics have been computed. Two important features of microplate sensors—resonance frequency tunability due to applied DC voltage and stability of resonance frequency during variation of operating temperature—have also been computed.ConclusionsThe investigation shows that the tunability of a microplate sensor increases in the presence of compressive axial internal stress, and the stability improves due to the presence of transverse pressure.
engineering, mechanical,mechanics
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