Improved 4H-SiC Metal–Semiconductor Field-Effect Transistors with Double-Symmetric-Step Buried Oxide Layer for High-Energy-Efficiency Applications

Shunwei Zhu,Hujun Jia,Mengyu Dong,Xiaowei Wang,Yintang Yang
DOI: https://doi.org/10.1007/s11664-022-09667-8
IF: 2.1
2022-05-16
Journal of Electronic Materials
Abstract:An improved 4H-SiC metal–semiconductor field-effect transistor (MESFET) with a double-symmetric-step buried oxide layer is proposed, and the mechanism is studied through TCAD simulation. The double-step buried oxide layer is mainly to improve the drain current and reduce the leakage current to the substrate. At the same time, the oxide layer changes the electric field distribution, and the breakdown voltage (Vb) is improved. The charge distribution of the device is also changed, and the frequency characteristics are also improved. The results show that the Vb and maximum output power density (Pout) are about 14% and 21.8% larger than those of the double-recessed (DR) 4H-SiC MESFET, respectively. In radio frequency characteristics, cutoff frequency (ft) and maximum oscillation frequency (fmax) are 11.9% and 20.3% higher than those of the DR MESFET. The maximum power-added efficiency in the L-band and S-band reaches 63.5%, which is 23.7% higher than in the DR structure. Compared with the 4H-SiC MESFET reported in recent years, the proposed structure has great advantages in high-frequency applications.
engineering, electrical & electronic,materials science, multidisciplinary,physics, applied
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