P‐1.17: Ultraviolet Light Response of Amorphous Oxide Thin‐Film Transistors with Double‐Stacked Channel Layers

Zenghui Fan,Wen Zhang,Ao Shen,Chengyuan Dong
DOI: https://doi.org/10.1002/sdtp.16043
2022-10-01
SID Symposium Digest of Technical Papers
Abstract:We investigated the ultraviolet (UV) light detectors of amorphous InGaZnO thin film transistors (a‐IGZO TFTs) with double‐stacked channel layers (DSCL). When the UV light wavelength decreased from 400 nm to 370 nm, the devices with DSCL exhibited better light response properties than those with single channel layers. Especially, the a‐IGZO TFT with DSCL (OR‐IGZO/OD‐IGZO) structure achieved 28.6 dB of sensitivity, 9.7×10−7 A/W of responsivity, and 1.6×108 cm•Hz0.5•W−1 of detectivity under the UV light with wavelength = 370 nm. This improvement was assumed to the best combination of light absorption and interface states for the special DSCL structure.
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