Room temperature nanoimprint aided by electron beam irradiation for polysilsesquioxane

Manabu Yasui,Yoshitake Nishi,Masahito Kurouchi,Satoru Kaneko,Masahiko Mitsuhashi
DOI: https://doi.org/10.35848/1347-4065/ad7963
IF: 1.5
2024-10-09
Japanese Journal of Applied Physics
Abstract:Recently, the application of inorganic nano-periodic structures has become an active area of research. Polysilsesquioxane (PSQ) is known as a hydrolytically stable organic-inorganic hybrid material and this study proposes RT nanoimprint using methylated poly silsesquioxane (Me-PSQ) dissolved in a high-boiling solvent. PSQ electron beam cross-linked by a high electron beam irradiation maintained the shape of nanopatterns and enhanced the heat resistance. As a result of the analysis of the Fourier transform infrared spectrophotometer (FT-IR), a siloxane linkage (Si-O-Si bridging) constitutes a core element of PSQ. The peak wavenumber of Si-O-Si bridging at cross-linked PSQ by electron beam irradiation shifted from 1115 to 1135 cm−1. The peaks shifted towards the high wavenumber side and approached the second peak (1170 cm−1) of the Si-O-Si stretching vibration of quartz. This result suggests that the physical properties of electron-beam irradiated PSQ approach those of quartz.
physics, applied
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