Design of Tensile-Strained GeSn/SiGeSn Structure for Low Threshold Mid-infrared Laser Application

Qingfang Zhang,wenxiang lu,Jitao Zhang,qianyu Chen,Pei Zhang,zirui Qin,lingzhi Cao,Genquan Han
DOI: https://doi.org/10.1088/1361-6463/ad58eb
2024-06-19
Journal of Physics D Applied Physics
Abstract:The plasticity of GeSn alloy energy band has promoted the development of silicon-based photoelectric integration and optical interconnection. A tensile-strained GeSn/SiGeSn double heterostructure laser wrapped with Si 3 N 4 stress liner is designed and characterized theoretically. The triaxial tensile strain is introduced into GeSn/SiGeSn heterostructure laser by the Si 3 N 4 linear stressor. The lower threshold current density and higher optical gain of the GeSn/SiGeSn laser can be achieved by tuning the band structure and carrier distribution in the active region with tensile strain and Sn compositions. Compared with the relaxed device, the value of n e,Γ /n e,total for the Ge 0.90 Sn 0.10 /Si 0.315 Ge 0.499 Sn 0.186 heterostructure laser wrapped with 300 nm Si 3 N 4 linear stressor is increased to 30.6% at n e,total of 10 18 cm -3 , the laser λ can be extended to 3.44 μm, and the J th is reduced from 206 A/cm 2 to 59 A/cm 2 .
physics, applied
What problem does this paper attempt to address?