Latest Advances in the Implementation and Characterization of High-K Gate Dielectrics in SiC Power MOSFETs

Lars Knoll,Giovanni Alfieri,Gianpaolo Romano,Andrei Mihaila,Yulieth Arango,Moritz Wehrle,Vinoth Sundaramoorthy,Stephan Wirths
DOI: https://doi.org/10.4028/p-kc5309
2022-06-01
Materials Science Forum
Abstract:Publication date: 31 May 2022 Source: Materials Science Forum Vol. 1062 Author(s): Lars Knoll, Giovanni Alfieri, Gianpaolo Romano, Andrei Mihaila, Yulieth Arango, Moritz Wehrle, Vinoth Sundaramoorthy, Stephan Wirths Recently high-k gate dielectrics for SiC power MOSFETs attracted increasing research interest thanks to promising results related to improved specific channel resistances and threshold voltage stability. We investigated high-k gate stacks for 1.2kV and 3.3kV SiC power MOSFETs regarding on-state performance and stability during high temperature gate bias tests. Furthermore, we studied the high-k/SiC interface quality and the effect of burn-in pulses using SiC MOSCAPs. High-k SiC power MOSFETs show significant improvement in on-state performance and threshold voltage stability. We found that the burn-in pulses can be shorter for high-k gate dielectrics compared to SiO2-based devices.
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