Abstract:The time evolution of the argon electron-beam plasma at intermediate pressure and low electron beam intensity was presented. By applying the amplitude modulation with the frequency of 20 Hz on the stable beam current, the plasma evolution was studied. A Faraday cup was used for the measurement of the electron beam current and a single electrostatic probe was used for the measurement of the ion current. Experimental results indicated that the ion current was in phase with the electron beam current in the pressure range from 200 Pa to 3000 Pa and in the beam current range lower than 20 mA, the residual density increased approximately linearly with the maximum density in the log-log plot and the fitting coefficient was irrelative to the pressure. And then three kinds of kinetic models were developed and the simulated results given by the kinetic model, without the consideration of the excited atoms, mostly approached to the experimental results. This indicated that the effect of the excited atoms on the plasma density can be ignored at intermediate pressure and low electron beam current intensity, which can greatly simplify the kinetic model. In the end, the decrease of the plasma density when the beam current was suddenly off was studied based on the simplified model and it was found that the decease characteristic at intermediate pressure was approximate to the one at high pressure at low electron beam intensity, which was in good accordance with the experimental results.

Ion Composition of the Beam Plasma Generated by Electron-Beam Evaporation of Metals and Ceramic in the Forevacuum Range of Pressure

On the influence of electron-beam metal evaporation on parameters of beam plasma in medium vacuum

Electron beam evaporation of boron at forevacuum pressures for plasma-assisted deposition of boron-containing coatings

Dielectric Coating Deposition Regimes during Electron-Beam Evaporation of Ceramics in the Fore-Vacuum Pressure Range

Measurement of mass-to-charge beam plasma ion composition during electron beam evaporation of refractory materials in the forevacuum pressure range

Electron Beam Formation and its Effect in Novel Plasma-optical Device for Evaporation of Micro-droplets in Cathode ARC Plasma Coating

Experimental study on melting and evaporation of metal exposed to intense hydrogen ion beam

Effects of Gas Pressure and Discharge Current on Beam Composition in a Magnetron Discharge Ion Source.

An evaporation source for ion beam assisted deposition in ultrahigh vacuum

Characteristics of a Source for Oxide Coating Deposition by the Electron-Beam Evaporation of Dielectric Materials

Intense Heavy Ion Beam-Induced Material Evaporation and the Resulting Dynamic Vacuum Deterioration of the Beam Line

Plasma flow from vacuum surface flashover initiated by 70-kV 20-ns pulses

Deposition of dielectric films on silicon using a fore-vacuum plasma electron source

The Effect of Atoms Excited by Electron Beam on Metal Evaporation

Experimental Investigation of the Effective Charge State of Ions in Beam–plasma Interaction

Investigations on the Time Evolution of the Plasma Density in Argon Electron-Beam Plasma at Intermediate Pressure

Production of warm ions in electron beam generated E × B plasma

Submillisecond Chromium Ion Beams with High-Pulse Power Density

Evaluation of Characteristics of Plasma Created by an Electron-Beam Generator with Gas Feeding into the Discharge Channel

Plasma dynamics at the preionization stage in discharge-based EUV lasers

Low energy solid intense ion beams extracted by electron beam evaporation ion source for material modifications