Nano silver-catalyzed chemical etching of polycrystalline silicon wafer for solar cell application

S. R. Chen,Z. C. Liang,D. L. Wang
DOI: https://doi.org/10.1063/1.4945398
IF: 1.697
2016-03-01
AIP Advances
Abstract:Silver nanoparticles were deposited on the surface of polycrystalline silicon wafer via vacuum thermal evaporation and metal-catalyzed chemical etching (MCCE) was conducted in a HF-H2O2 etching system. Treatment of the etched silicon wafer with HF transformed the textured structure on the surface from nanorods into nanocones. An etching time of 30 s and treatment with HF resulted in nanocones with uniform size distribution and a reflectivity as low as 1.98% across a spectral range from 300 to 1000 nm.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
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