Simple Smoothing of the Bottom Silicon Surface Using Wet Chemical Etching Methods for Epitaxial III‐V/Silicon Tandem Manufacturing

Mengmeng Chu,Junhan Bae,Muhammad Quddamah Khokhar,Alamgeer,Maha Nur Aida,Vinh‐Ai Dao,Duy Phong Pham,Sangheon Park,Junsin Yi
DOI: https://doi.org/10.1002/ente.202401322
IF: 4.149
2024-10-26
Energy Technology
Abstract:Due to the difference in bond energy between the (100) and (111) crystal planes, the etching rates of HNA are also different. Therefore, after HNA etching, using high‐concentration (20%) KOH etching can achieve a surface roughness of less than 2 nm (specifically 0.816 nm over a measurement area of 1 × 1 μm2). The implementation of diverse technologies has recently facilitated the production of cost‐effective and highly efficient solar cells. High‐efficiency solar cells with III‐V compounds tandem crystalline silicon cells have achieved photovoltaic efficiency of higher than 39%. Etching silicon wafers plays a vital role in the deposition of epitaxial layers, neutralizing dangling bonds, and surface passivation for tandem solar cells. The wafers are polished using a solution of HF–HNO3–CH3COOH (HNA) and 20% KOH to smoothen the wafer surface. When HNA wet etching is performed for 3.5 min and the 20% KOH etching lasts for 6 min, the microroughness of the wafer is 1.9 nm with a measurement area of 10 × 10 μm2 and 0.816 nm within an area of 1 × 1 μm2. Compared with the as‐cut wafer, the reflectance increases from 31.7% to 34.7%, and the effective minority carrier lifetime, with 30 nm Al2O3 passivation after 450 °C activated, increases from 1.4 to 1.8 ms in a carrier density of 1.0 × 1015 cm−3.
energy & fuels
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