Enhancement of near-UV GaN LED light extraction efficiency by GaN/sapphire template patterning

M Ali,O Svensk,L Riuttanen,M Kruse,S Suihkonen,A E Romanov,P T Törmä,M Sopanen,H Lipsanen,M A Odnoblyudov,V E Bougrov
DOI: https://doi.org/10.1088/0268-1242/27/8/082002
IF: 2.048
2012-07-11
Semiconductor Science and Technology
Abstract:We present near-UV GaN light-emitting diodes (LEDs) grown on patterned GaN/sapphire templates with improved material quality and light extraction efficiency. Enhancement of light extraction efficiency is attributed to voids generated at the GaN/sapphire interface. The sidewall inclination angle of the voids can be controlled from nearly vertical (∼ 85°) to fully inclined (∼ 60°) by changing the initial patterning dimensions. Light extraction efficiency and material quality improve with a decreasing void sidewall angle. A 20% increase in the light output is observed at 20 mA of input current for LED structures with ∼60° inclined sidewall voids.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter
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