Abstract:Multiplefield coupling is a typical characteristic of most mechanical structures in microelectromechanical system (MEMS), that involves the effects due to mechanical, electrostatic, magnetic, thermal actions, etc. Dynamic behaviors of the microstructures in those fields are of importance to estimate the design and manufacturing of the microsystem. In this paper, electromechanical analyses of some microstructures are presented based on a combination of boundary element method (BEM) and finite element method (FEM), to show the hybrid numerical technique not only useful to analyze the flexible deformation of the structures under electrostatic forces, but also important to evaluate the parameter variations of the electronic fields as the movement of the mechanical structures in those structronic systems. The simulation procedure is verified by both analytical solutions of some examples and experimental results of some microstructures driven by electrostatic field, in which the mechanical parameters such as the divergence of the deflection solution is related to the electrical characteristic such as the critical voltages of the electrostatic forces. Based on the structures involved in a laterally vibratory polysilicon gyroscope fabricated in our institute, the control equations of microgyroscope dynamics are presented, from that the response simulations of the microgyro are performed with the changes of the characteristic parameters, such as resonant frequency, quality factors, frequency disturbance, etc. Those results are useful for the optimal design of the structronic systems and the quality evaluation of the microprocessing, which are related to the rate measurement sensitivity and the output stability of the microsystem.

Modal FEM Analysis Using Weak Form Equations for a Microgyroscope with Bulk Giant Magnetostrictive Material (GMM) Resonator

Multi-physics Coupling Field Finite Element Analysis on Giant Magnetostrictive Materials Smart Component

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

Electromechanical Analysis of Microelectromechanical Structures and Dynamic Simulations of Laterally Vibratory Microgyroscope

Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification

A Novel Microelectromechanical Resonant Gyroscope

Design and Analyses of a MEMS Based Resonant Magnetometer

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Dynamic Modeling of the Multiring Disk Resonator Gyroscope

A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes

Investigation and analysis of a MOEMS gyroscope based on novel resonator

Design and Simulation of Novel MEMS Resonant Gyroscope

Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope

A Detailed Analysis of the Dynamic Behavior of a MEMS Vibrating Internal Ring Gyroscope

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

Dynamical analysis of an improved MEMS ring gyroscope encircled by piezoelectric film

FEM SIMULATION OF COMB-GIMBAL MICROMACHINED GYROSCOPE

Optimizing magnetoelastic properties by machine learning and high-throughput micromagnetic simulation

A multi-physics coupling formulation for vibro-acoustic analysis of FGMEE plates