Study on the growth of Al-doped ZnO thin films with (112̄0) and (0002) preferential orientations and their thermoelectric characteristics

Jing-Ting Luo,Ao-Jie Quan,Zhuang-Hao Zheng,Guang-Xing Liang,Fu Li,Ai-Hua Zhong,Hong-Li Ma,Xiang-Hua Zhang,Ping Fan
DOI: https://doi.org/10.1039/c7ra12485f
IF: 4.036
2018-01-01
RSC Advances
Abstract:In this work, using a conventional magnetron sputtering system, Al-doped ZnO (AZO) films with (112̄0) and (0002) preferential orientations were grown on r -sapphire and a -sapphire substrates, respectively.
chemistry, multidisciplinary
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