Abstract:Intrinsically stretchable electronics with skin-like mechanical properties have been identified as a promising platform for emerging applications ranging from continuous physiological monitoring to real-time analysis of health conditions, to closed-loop delivery of autonomous medical treatment 1 – 7 . However, current technologies could only reach electrical performance at amorphous-silicon level (that is, charge-carrier mobility of about 1 cm 2 V −1 s −1 ), low integration scale (for example, 54 transistors per circuit) and limited functionalities 8 – 11 . Here we report high-density, intrinsically stretchable transistors and integrated circuits with high driving ability, high operation speed and large-scale integration. They were enabled by a combination of innovations in materials, fabrication process design, device engineering and circuit design. Our intrinsically stretchable transistors exhibit an average field-effect mobility of more than 20 cm 2 V −1 s −1 under 100% strain, a device density of 100,000 transistors per cm 2 , including interconnects and a high drive current of around 2 μA μm −1 at a supply voltage of 5 V. Notably, these achieved parameters are on par with state-of-the-art flexible transistors based on metal-oxide, carbon nanotube and polycrystalline silicon materials on plastic substrates 12 – 14 . Furthermore, we realize a large-scale integrated circuit with more than 1,000 transistors and a stage-switching frequency greater than 1 MHz, for the first time, to our knowledge, in intrinsically stretchable electronics. Moreover, we demonstrate a high-throughput braille recognition system that surpasses human skin sensing ability, enabled by an active-matrix tactile sensor array with a record-high density of 2,500 units per cm 2 , and a light-emitting diode display with a high refreshing speed of 60 Hz and excellent mechanical robustness. The above advancements in device performance have substantially enhanced the abilities of skin-like electronics.

Skin electronics from scalable fabrication of an intrinsically stretchable transistor array

Direct Fabrication of Stretchable Electronics on a Polymer Substrate with Process‐Integrated Programmable Rigidity

Stretchable silicon electronics and their integration with rubber, plastic, paper, vinyl, leather and fabric substrates

Intrinsically Stretchable Electronics with High Performance and Large Integration Scale

High-speed and Large-Scale Intrinsically Stretchable Integrated Circuits

Design of Strain-Limiting Substrate Materials for Stretchable and Flexible Electronics

Stretchable, Curvilinear Electronics Based on Inorganic Materials

Stretchable and Foldable Silicon Integrated Circuits

Stretchable electronics: epidermal electronics with advanced capabilities in near-field communication (small 8/2015).

Flexible Electronics: Ultrathin Silicon Circuits with Strain‐Isolation Layers and Mesh Layouts for High‐Performance Electronics on Fabric, Vinyl, Leather, and Paper (adv. Mater. 36/2009)

Ultrathin Silicon Circuits with Strain‐Isolation Layers and Mesh Layouts for High‐Performance Electronics on Fabric, Vinyl, Leather, and Paper

Mechanics of Stretchable Electronics

Electronic Skin from High-Throughput Fabrication of Intrinsically Stretchable Lead Zirconate Titanate Elastomer

Soft elastomeric composite materials with skin-inspired mechanical properties for stretchable electronic circuits.

3D-Printed Intrinsically Stretchable Organic Electrochemical Synaptic Transistor Array

The development of stretchable and self-repairing materials applied to electronic skin

Stiffness and Interface Engineered Soft Electronics with Large-Scale Robust Deformability

Intrinsically stretchable electronics with ultrahigh deformability to monitor dynamically moving organs

Mechanics and Thermal Management of Stretchable Inorganic Electronics.

A Structured Design for Highly Stretchable Electronic Skin

Stretchable Electronics: A Stretchable Electronic Fabric Artificial Skin with Pressure‐, Lateral Strain‐, and Flexion‐Sensitive Properties (adv. Mater. 4/2016)