Abstract:Intrinsically stretchable electronics with skin-like mechanical properties have been identified as a promising platform for emerging applications ranging from continuous physiological monitoring to real-time analysis of health conditions, to closed-loop delivery of autonomous medical treatment 1 – 7 . However, current technologies could only reach electrical performance at amorphous-silicon level (that is, charge-carrier mobility of about 1 cm 2 V −1 s −1 ), low integration scale (for example, 54 transistors per circuit) and limited functionalities 8 – 11 . Here we report high-density, intrinsically stretchable transistors and integrated circuits with high driving ability, high operation speed and large-scale integration. They were enabled by a combination of innovations in materials, fabrication process design, device engineering and circuit design. Our intrinsically stretchable transistors exhibit an average field-effect mobility of more than 20 cm 2 V −1 s −1 under 100% strain, a device density of 100,000 transistors per cm 2 , including interconnects and a high drive current of around 2 μA μm −1 at a supply voltage of 5 V. Notably, these achieved parameters are on par with state-of-the-art flexible transistors based on metal-oxide, carbon nanotube and polycrystalline silicon materials on plastic substrates 12 – 14 . Furthermore, we realize a large-scale integrated circuit with more than 1,000 transistors and a stage-switching frequency greater than 1 MHz, for the first time, to our knowledge, in intrinsically stretchable electronics. Moreover, we demonstrate a high-throughput braille recognition system that surpasses human skin sensing ability, enabled by an active-matrix tactile sensor array with a record-high density of 2,500 units per cm 2 , and a light-emitting diode display with a high refreshing speed of 60 Hz and excellent mechanical robustness. The above advancements in device performance have substantially enhanced the abilities of skin-like electronics.

Stretchable and Foldable Silicon Integrated Circuits

Complementary Metal Oxide Silicon Integrated Circuits Incorporating Monolithically Integrated Stretchable Wavy Interconnects

Stretchable silicon electronics and their integration with rubber, plastic, paper, vinyl, leather and fabric substrates

Optimized Structural Designs for Stretchable Silicon Integrated Circuits

Stretchable, Curvilinear Electronics Based on Inorganic Materials

Ultrathin Silicon Circuits with Strain‐Isolation Layers and Mesh Layouts for High‐Performance Electronics on Fabric, Vinyl, Leather, and Paper

Flexible Electronics: Ultrathin Silicon Circuits with Strain‐Isolation Layers and Mesh Layouts for High‐Performance Electronics on Fabric, Vinyl, Leather, and Paper (adv. Mater. 36/2009)

Direct Fabrication of Stretchable Electronics on a Polymer Substrate with Process‐Integrated Programmable Rigidity

Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations

Design of Strain-Limiting Substrate Materials for Stretchable and Flexible Electronics

Designing Thin, Ultrastretchable Electronics with Stacked Circuits and Elastomeric Encapsulation Materials.

Mechanics of stretchable inorganic electronic materials

Soft Elastomers with Programmable Stiffness As Strain-Isolating Substrates for Stretchable Electronics.

Inorganic Semiconducting Materials for Flexible and Stretchable Electronics

Mechanics of Noncoplanar Mesh Design for Stretchable Electronic Circuits

High-speed and Large-Scale Intrinsically Stretchable Integrated Circuits

Integrated Photonics Put at Full Stretch: Flexible and Stretchable Photonic Devices Enabled by Optical and Mechanical Co-Design

Full integration of highly stretchable inorganic transistors and circuits within molecular-tailored elastic substrates on a large scale

Soft elastomeric composite materials with skin-inspired mechanical properties for stretchable electronic circuits.

Mechanics and Thermal Management of Stretchable Inorganic Electronics.

Mechanics of Stretchable Electronics