A SAW hydrogen sensor based on decoration of graphene oxide by palladium nanoparticles on AIN/Si layered structure

Dongsheng Li,Xianhao Le,Jintao Pang,Li Peng,Zhen Xu,Chao Gao,Jin Xie
DOI: https://doi.org/10.1088/1361-6439/ab061b
2019-02-27
Journal of Micromechanics and Microengineering
Abstract:This work proposes a surface acoustic wave (SAW) hydrogen sensor based on the decoration of graphene oxide (GO) by palladium nanoparticles on AIN/Si layered structure. A thin decoration of GO by palladium nanoparticles layer is directly coated on the sensor surface as sensing layer. The SAW hydrogen sensor shows higher sensitivity (~9.5 times) and lower cross-sensitivity towards NO2 compared to those based on GO only. The hydrogen sensor has good stability and fast response. The response time and recovery time are both 7 s. The frequency shift of the sensor with hydrogen concentration change is described by a fitting formula. Response mechanism is investigated based on complex impedance spectroscopy at various hydrogen concentration levels.
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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