A Saw Hydrogen Sensor Based on the Composite of Graphene Oxide and Palladium Nanoparticles

Dongsheng Li,Xianhao Le,Jintao Pang,Jin Xie
DOI: https://doi.org/10.1088/1361-6439/ab061b
2019-01-01
Abstract:This work proposes a surface acoustic wave (SAW) hydrogen sensor based on the decoration of graphene oxide (GO) by palladium nanoparticles on AIN/Si layered structure. A thin decoration of GO by palladium nanoparticles layer is directly coated on the sensor surface as sensing layer. The SAW hydrogen sensor shows higher sensitivity (~9.5 times) and lower cross-sensitivity towards NO 2 compared to those based on graphene oxide only. The hydrogen sensor has good stability and fast response ( Tres = 6s, Trec = 7s). The frequency shift of the sensor with hydrogen concentration change is described by a fitting formula.
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