Apparatus for characterizing the VUV and soft x‐ray optical elements at the Photon Factory

Shichiro Mitani,Takeshi Namioka,Mihiro Yanagihara,Kojun Yamashita,Junji Fujita,Shigeru Morita,Tatsuo Harada,Taizo Sasaki,Shigeru Sato,Tsuneaki Miyahara,Tsuneharu Koide,Akira Mikuni,Wataru Okamoto,Hideki Maezawa
DOI: https://doi.org/10.1063/1.1140773
IF: 1.6
1989-07-01
Review of Scientific Instruments
Abstract:An apparatus dedicated to characterizing the VUV and soft x-ray optical elements was fabricated, and a preliminary test on its performance was made in the soft x-ray region with a grasshopper monochromator at the Photon Factory. The results demonstrated that quantitative evaluation of diffraction efficiency of a grating could be easily performed using the apparatus.
instruments & instrumentation,physics, applied
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