Abstract:We are developing superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting specifications of X-ray imaging spectrometers including high count-rate, high energy resolution, and large field-of-view. In particular, a focal plane composed of two sub-arrays: one of fine-pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit (X-IFU) instrument on the European Space Agency's Athena mission. We have based the sub-arrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all gold X-ray absorber on 50 and 75 micron scales where the Mo/Au TES sits atop a thick metal heatsinking layer have shown high resolution and can accommodate high count-rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au and an added bismuth layer in a 250 micron square absorber. To tune the parameters of each sub-array requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single ion milling step. We demonstrate methods for integrating heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each sub-array, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (Tc) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these "hybrid" arrays will be presented.

Study on data processing for x-ray spectrometer based on microcalorimeter

Modelling a Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Profile Measurements and Energy Dispersive Diffraction

Design and Development of a 224-pixel TES X-Ray Microcalorimeter System for Microanalysis with STEM

A Review of X-ray Microcalorimeters Based on Superconducting Transition Edge Sensors for Astrophysics and Particle Physics

Transition edge sensor based detector: from X-ray to $γ$-ray

Transition-Edge Sensor Microcalorimeters for X-ray Beamline Science

Development of TES-based X-ray Microcalorimeters for HUBS

Measurement Of Energy Resolution For TES Microcalorimeter With Optical Pulses

Absolute Energy Measurements with Superconducting Transition-Edge Sensors for Muonic X-ray Spectroscopy at 44 keV

Beamline Spectroscopy of Integrated Circuits With Hard X-ray Transition Edge Sensors at the Advanced Photon Source

Transition-Edge Sensors for cryogenic X-ray imaging spectrometers

Magnetic microcalorimeter with paramagnetic temperature sensors and integrated dc-SQUID readout for high-resolution x-ray emission spectroscopy

Simulation Method for Investigating the Use of Transition-Edge Sensors as Spectroscopic Electron Detectors

Energy calibration of high-resolution X-Ray TES microcalorimeters with 3 eV optical photons

Calibration and Testing of Small High-Resolution Transition Edge Sensor Microcalorimeters with Optical Photons

Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging

High-resolution Compton spectroscopy using x-ray microcalorimeters

Improvement of Energy Resolution of X-Ray Transition-Edge Sensor Using K-means Algorithm and Wiener Filter

Fabrication of X-ray Microcalorimeter Focal Planes Composed of Two Distinct Pixel Types

Developing X-Ray Microcalorimeters Based on TiAu TES for HUBS