Abstract:We are developing superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting specifications of X-ray imaging spectrometers including high count-rate, high energy resolution, and large field-of-view. In particular, a focal plane composed of two sub-arrays: one of fine-pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit (X-IFU) instrument on the European Space Agency's Athena mission. We have based the sub-arrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all gold X-ray absorber on 50 and 75 micron scales where the Mo/Au TES sits atop a thick metal heatsinking layer have shown high resolution and can accommodate high count-rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au and an added bismuth layer in a 250 micron square absorber. To tune the parameters of each sub-array requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single ion milling step. We demonstrate methods for integrating heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each sub-array, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (Tc) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these "hybrid" arrays will be presented.

Modelling a Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Profile Measurements and Energy Dispersive Diffraction

Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging

Transition-Edge Sensor Microcalorimeters for X-ray Beamline Science

Transition edge sensor based detector: from X-ray to $γ$-ray

Beamline Spectroscopy of Integrated Circuits With Hard X-ray Transition Edge Sensors at the Advanced Photon Source

Study on data processing for x-ray spectrometer based on microcalorimeter

Electro-Thermal Simulation and Evaluation of Transition Edge Sensor X-ray Microcalorimeter with Mushroom-Type Absorber

Use of Transition Models to Design High Performance TESs for the LCLS-II Soft X-Ray Spectrometer

Transition-Edge Sensors for cryogenic X-ray imaging spectrometers

Simulation Method for Investigating the Use of Transition-Edge Sensors as Spectroscopic Electron Detectors

Design and Development of a 224-pixel TES X-Ray Microcalorimeter System for Microanalysis with STEM

Mitigating the effects of charged particle strikes on TES arrays for exotic atom X-ray experiments

High-resolution Compton spectroscopy using x-ray microcalorimeters

Microstructure Analysis of Bismuth Absorbers for Transition-Edge Sensor X-ray Microcalorimeters

A Review of X-ray Microcalorimeters Based on Superconducting Transition Edge Sensors for Astrophysics and Particle Physics

Calibration and Testing of Small High-Resolution Transition Edge Sensor Microcalorimeters with Optical Photons

Absolute Energy Measurements with Superconducting Transition-Edge Sensors for Muonic X-ray Spectroscopy at 44 keV

Fabrication of X-ray Microcalorimeter Focal Planes Composed of Two Distinct Pixel Types

Signal readout for Transition-Edge Sensor X-ray imaging spectrometers

Characterization of Transition Edge Sensors for Decay Energy Spectrometry

Monte Carlo Comparisons to a Cryogenic Dark Matter Search Detector with low Transition-Edge-Sensor Transition Temperature