Abstract:Electric field sensing has wide applications in electromagnetic compatibility, communication, electromagnetic radiation, wireless monitoring in aviation, et.al. With the development of precision devices, there is a growing need to measure weak electric field in complex environments. Traditional electric field sensors, due to the presence of multiple metal electrodes, often suffer from interference with the measured field, making it difficult to accurately measure weak electric field in space and unsuitable for narrow space field measurements due to their large size. In order to solve these problems, this paper presents a high-sensitivity electric field sensing chip based on lithium niobate material. The sensing chip adopts the Michelson interference for the sensing measurement of electric field. The sensor was designed for high sensitivity measurement at specific frequency. To demonstrate the versatility of the proposed solution, two target frequencies of 10 GHz and 12 GHz were designed to analyze the frequency response of various antenna parameters based on a tapered dipole antenna structure Based on the simulation. We fabricated electric field sensing chips with dimensions consistent with the simulation, parameters of dipole lengths 1.5mm and 2mm, and modulation electrode lengths of 4.4mm and 5mm were determined to fabricate the proposed chip. The fabricated chip size was 23.2mm × 4.6mm × 1.5mm. The experimental results demonstrated that the electric field sensing chips exhibited good linearity. Under the condition that the signal-to-noise ratio of 10dB, the measured sensitivities of the two sensing chips at their respective resonant frequencies were 41.6μV/m and 32.7μV/m.

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