Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

A Comparison of Excitation Conditions between Conventional and Low-Flow, Low-Power Inductively Coupled Plasma Torches

Design and Construction of a Low-Flow, Low-Power Torch for Inductively Coupled Plasma Spectrometry

Current–voltage Characteristics of Hydrogen DC Plasma Torches with Different Sizes in an External Axial Magnetic Field

Theoretical Aspects and Design of a Low-Power, Low-Flow-Rate Torch in Inductively Coupled Plasma Atomic Emission Spectroscopy

Effects of induction coil parameters of plasma torch on the distribution of temperature and flow fields

Power Dissipation of an Inductively Coupled Plasma Torch under E Mode Dominated Regime

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

The Design and Analysis of a Novel Low Power Atmospheric Plasma Jet Torch for Optical Fabrication

Experimental and Simulation Investigation of Electrical and Plasma Parameters in a Low Pressure Inductively Coupled Argon Plasma

Influence of secondary gas on control characteristics of ICP-RF plasma torches

Influence of Configurations of Chamber and Coil on Uniformity of Plasma Distribution for Inductively Coupled Plasma Etcher

Inductively Coupled Facility Qualification for Electron Transpiration Cooling Investigations

Two-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

Alternating current-driven non-thermal arc plasma torch working with air medium at atmospheric pressure

Imaging Diagnostics and Gas Temperature Measurements of Atmospheric-Microwave- Induced Air Plasma Torch

Investigation on a Low Pressure Plasma Jet in an Inductively Coupled Plasma

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

A Comparison among Optical Emission Spectroscopic Methods of Determining Electron Temperature in Low Pressure Argon Plasmas

The Effect of Discharge Conditions of ICP Etching Reactor on Plasma Parameters

Calculations of flow field and heat exchange properties in high-power high-enthalpy inductively coupled plasma generator