Abstract:Inductively coupled plasma generator is one of the core components of the near-space high-speed target plasma electromagnetic scientific experimental research device, which is often used to simulate high enthalpy and high speed plasma sheath environment. In order to study the discharge characteristics of inductively coupled plasma generator under high power, radio frequency and medium pressure, the numerical simulation and experiment are combined to study its internal heat transfer and flow characteristics in this paper. Based on the local thermodynamic equilibrium conditions, the numerical simulation of large-scale radio frequency and medium pressure inductively coupled plasma with a power of 100–400 kW is carried out through the multi-field coupling of flow, electromagnetic and temperature field, and verified by light intensity and spectrum experiment. The results show that the electromagnetic field distribution in the high-power thermal balance inductively coupled plasma generator is similar to that of the small- and medium-sized power plasma generator. The discharge energy dissipation occurs mainly in the area where the induction coil is located. The temperature of the inner wall of the quartz tube is higher at the coil location than in other areas, and the plasma has a ring-shaped high-temperature structure. The outer wall of the quartz tube is set to be the boundary condition of heat flux for simulating the temperature change of the quartz tube under cold blowing. This setting is in coincidence with factual situations. The wall temperature of the quartz tube at the entrance and at the induction coil section are found to be relatively high. When the large-size inductively coupled plasma generator works, an obvious return vortex is generated at the entrance due to the temperature difference and the electromagnetic pumping effect, and the exit velocity increases slightly with the increase of power. At the same time, the discharge experiment under the corresponding conditions shows that there is found a ring structure with bright edges and dark centers in the axial image of the argon discharge. Moreover, the emission spectrum of argon plasma is measured through the spectrum diagnosis system and the spatial distribution of the generator electron temperature is obtained. The light intensity of the discharge image and the electron temperature measured by the spectrum are found to be in comparative coincidence with the COMSOL simulation temperature result, demonstrating the validity of the numerical simulation results under thermodynamic equilibrium conditions. The numerical simulation results in this paper are also applicable to the optimization design and temperature resistance evaluation of the inductively coupled plasma generator.

Calculations of flow field and heat exchange properties in high-power high-enthalpy inductively coupled plasma generator

Numerical Simulation and Experimental Study of High-Power Thermal Equilibrium Inductively Coupled Plasma

Thermodynamic Parameters and Energy Transfer Analysis of High Enthalpy Inductively Coupled Plasma

Three-Dimensional Numerical Simulation of Inductively Coupled Plasma Generator

Analysis of Enthalpy and Energy Conversion Efficiency in High-Power Inductively Coupled Plasma

Emission Spectroscopy Diagnosis and Discharge Characteristics Distribution Analysis of High-Frequency, High-Enthalpy Inductive Coupling Plasma Generator

Flow Field Analysis of the Chemical Reaction of High-temperature Air in a Plasma Generator

Effects of induction coil parameters of plasma torch on the distribution of temperature and flow fields

Experimental and Simulation Investigation of Electrical and Plasma Parameters in a Low Pressure Inductively Coupled Argon Plasma

Kinetic simulations of low-pressure inductively coupled plasma: an implicit electromagnetic PIC/MCC model with the ADI-FDTD method

Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

Influence of Configurations of Chamber and Coil on Uniformity of Plasma Distribution for Inductively Coupled Plasma Etcher

Static Electric Field Intensity Calculation of Two Kinds of Electrode Structure Plasma Generator

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

Numerical Simulation of Heat Transfer and Fluid Flow of a Non-Equilibrium Argon Plasma Jet with Confined Wall

Two-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

The Effect of Discharge Conditions of ICP Etching Reactor on Plasma Parameters

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma (icp) Etching Reactor

Electrical Description of an Inductively Coupled Plasma Processing Reactor with Discharge Parameters Calculated from a Global Model

Two-dimensional Model and Experimental Comparison of an Inductively Coupled Plasma

Volt-Ampere and Thermal Features of a Direct-Current Dual-Jet Plasma Generator with a Cold Gas Injection