Static Electric Field Intensity Calculation of Two Kinds of Electrode Structure Plasma Generator

ZhongHe Jiang,Xiwei Hu,Minghai Liu,Chengzhi Sun,Yuefei Zhang,Guangliang Chen,Yuanjing Ge,ZHANG Guang-qiu
2007-01-01
Abstract:High pressure dielectric barrier discharge generator can be applied in many fields,for example,thin film deposition,plasma etching,improving biocompatibility,plasma chemistry,synthesis of nano materials due to their enhanced plasma chemistry,and the absorption and reflection of electromagnetic waves electromagnetic shield technology of plasma.In this paper,two kinds of high pressure surface dielectric barrier discharge generator are designed and their static electric field is calculated by boundary-element-method(BEM).The results indicate that,when the static anode and cathode voltage is about ±10 kV respectively,in such area of which the vertical distance to the electrodes plane is from 5 mm to 10 mm,the maximal static electric field intensity is still about 1 000 V/mm.Comparing to the combed electrodes surface discharge generator,this electric field distribution of the improved generators is greatly in favor of the enhancement of plasma thickness in high pressure.And according to the numerical calculated results,two kinds of high pressure surface dielectric barrier discharge generator are developed,and the corresponding experiment results prove that the effects of two kinds of discharge generator are better than that of the combed electrode.
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