Studies on the electrical characteristics of a radio-frequency atmospheric-pressure plasma jet array

qing zhou,zhibin wang,qiuyue nie,heping li,qiang chen,chengyu bao
DOI: https://doi.org/10.1109/PLASMA.2012.6383419
2012-01-01
Abstract:Summary form only given. With the unique features of low gas temperatures, low breakdown/discharge voltages and high concentrations of chemically reactive species, radio-frequency, atmospheric-pressure glow discharge (RF APGD) plasmas produced using a water-cooled bare-metallic electrode plasma generator configuration have been used widely in the fields of plasma-based etching, deposition, disinfection/sterilization of heat-sensitive medical instruments, gene mutation breeding of microbes, etc.1,2. For promoting actual applications of the RF APGDs, it is an issue to produce the large-area and uniform glow discharge plasma jets so as to obtain the high treatment efficiency.
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