Physical properties of amorphous molybdenum silicide films for single-photon detectors

Xiaofu Zhang,Ilya Charaev,Huanlong Liu,Tony X Zhou,Dong Zhu,Karl K Berggren,Andreas Schilling
DOI: https://doi.org/10.1088/1361-6668/ac1524
2021-08-04
Superconductor Science and Technology
Abstract:We systematically investigated the physical properties of amorphous MoxSi1−x films deposited by magnetron co-sputtering. The critical temperature Tc of MoxSi1−x films increases gradually with the Mo stoichiometry x, and the highest Tc = 7.9 K was found in Mo0.83Si0.17, where homogeneous films with the maximum Mo content can be obtained. The thick films of Mo0.83Si0.17 show surprising degradation in which the onset of zero-resistivity is suppressed below 2 K. The thin Mo0.83Si0.17films, however, reveal robust superconductivity even with thickness d ≈ 2 nm. We also characterized wide microwires based on the 2 nm thin Mo0.8Si0.2 films with wire widths 40 and 60 μm, which show single-photon sensitivity at 780 nm and 1550 nm wavelength.
physics, condensed matter, applied
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