Method of micro hole tilt adjustment based on a vision-guided touch probe

He Zhang,Jiwen Cui,Jiubin Tan

DOI: https://doi.org/10.1364/OE.475396

IF: 3.8

2022-10-26

Optics Express

Abstract:He Zhang, Jiwen Cui, Jiubin Tan In order to meet the increasing miniaturization and high precision requirements of high-performance devices in aerospace and other fields ... [Opt. Express 30, 41133-41146 (2022)]

optics

What problem does this paper attempt to address?

Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner

邹伟,戴惠良,钟建安

DOI: https://doi.org/10.3969/j.issn.1009-444x.2008.03.007

2008-01-01

Abstract:Step-magnifying mechanism of planar micro-positioner has been presented through using a level enlarging mechanism and a double-nesting structure to design a flexible hinge structure for enlarging the displacement range of piezoelectric ceramics on two directions and feeding step length,and at the same time reducing the response time.To do so,it is necessary to choose the enlarging lever reasonably and optimize the design of the overall structure.
Self-Calibration Vision Method and System for Automatically Moving CMM Stylus Into Micro Holes

Zhen-Ying Cheng,Yuan Sun,He Luan,Hong-Li Li,Qiao-Sheng Pan,Rui-Jun Li

DOI: https://doi.org/10.1109/jsen.2021.3139639

IF: 4.3

2022-02-15

IEEE Sensors Journal

Abstract:The components with micro deep holes have massive presence in different major equipment or systems. Coordinate measuring machine (CMM) remains the main equipment to measure these components because non-contact methods cannot be applied to micro deep holes. However, moving probe tips into micro holes accurately is extremely difficult for CMM through existing methods. Therefore, this study puts forward a self-calibration and high-precision vision method and system. The algorithm for automatic determination of the probe tip movement scheme is proposed, several suitable image processing methods are selected, and the vision system is designed and tested on CMM. Experimental results show that a probe tip with a diameter of $60 \boldsymbol {\mu }\text{m}$ can be moved into micro holes below $100 \boldsymbol {\mu }\text{m}$ with a success rate of 100%. This method and system can be used to provide an effective means for highly precise and fast measurement of micro holes.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Method of inclined hole axis adjustment based on geometric optimization and minimum zone theory

He Zhang,Shixiong Yan,Li Wang,Chenghui Sun,Jiwen Cui

DOI: https://doi.org/10.1088/1361-6501/ad330a

IF: 2.398

2024-03-13

Measurement Science and Technology

Abstract:The machining accuracy of the axis position and spatial angle of the array microholes with high aspect ratio on the components of high-end equipment manufacturing industry will directly affect the performance of the whole machine. A method of tilt hole axis adjustment is proposed in this paper. It utilizes geometric optimization and minimum zone theory to measure the position and spatial angle of the hole axis. This addresses the slight angle error that occurs after correcting the inclined hole axis using visual techniques. Based on the minimum zone criterion of cylindricity error, the evaluation model is re-established through inner and outer loop and spatial projection, which includes roundness evaluation of the projection curve by improved particle swarm optimization algorithm and elliptic fitting by geometric parameter method, so as to obtain the optimal solution of the axis vector and spatial angle. According to the above theory, the experimental comparison shows that the precision of the method proposed is better than that of the least square method and the traditional particle swarm optimization algorithm based on the minimum zone criterion. The research results indicate that the precision of tilt angle is better than 0.03°, simultaneously the rotation angle is better than 0.1° in the range of 1°. This experiment verifies the effectiveness and accuracy of the proposed method.

engineering, multidisciplinary,instruments & instrumentation
Arbitrary Manipulation of Micro-Particles in Three Dimensions by Steering of Multiple Orbital Angular Momentum Modes

Ting Xie,HuiHui Wang,Fei Yuan,Shengqian Chang,Peng Sun,Siman Zhang,Huaye Li,Siqi Liu,Chang Wang,Zhenrong Zheng

DOI: https://doi.org/10.1117/12.2272165

2017-01-01

Abstract:Optical tweezers is an increasingly important technique for controlling and probing particles since computer-generated holography (CGH) make steering of multiple traps individually possible. In addition, the dark focus of orbital angular momentum (OAM) beams is increasingly widely used in trapping reflecting, absorbing or low-dielectric-constant objects. In this paper, we present a method to create arbitrary three-dimensional configurations of orbital angular momentum modes to achieve manipulation of micro-particles. Compared with conventional optical tweezers, this method can steer mixed arrays of traps individually and randomly by producing three-dimensional structure of optical vortices. These optical traps we used was formed by a CGH generated complex phase mask, which has three components: 1) a helical phase mask to change the transverse phase structure, 2) a blazed grating phase mask to vary the propagation direction of the incident beams, and 3) a modulated grating phase mask to divert the focal plane from the planar configurations. The latter one ensure that we can form threedimensional trapping patterns. The trap patterns can also be generated dynamically by holographic display system based on liquid crystal on silicon (LCoS). The experimental results show that the refresh frequency of reconfiguring achieves 24fps. Our method is effective and promise an exciting new opportunity to be used as a valuable non-contact manipulation tool in various applications.
Non-cylinder Holes Precision Machining by Giant Magnetostrictive Components with Sliding Mode Control

张雷,邬义杰,王彬,刘孝亮

DOI: https://doi.org/10.3785/j.issn.1008-973x.2012.08.009

2012-01-01

Abstract:Applied a method of discrete sliding mode control with combination reaching law,to realize high precision of micro displacement and real-time control of non-cylinder holes precision machining by giant magnetostrictive components.In the first,a state equation of the sliding control mode was established by the driven model of giant magnetostrictive components and the dynamics analysis of non-cylinder holes precision machining.And solve the problem of unpredictable cutting interference by real-time feedback of micro-displacement.The simulation and experimental results show,the micro-displacement simulation error of non-cylinder holes precision machining by giant magnetostrictive components within ± 0.8%,and has the characteristics of fast approaching the sliding surface and inhibits of buffeting.And the experiments of micro-displacement tracking error within ± 5%.
An Improved Two-Point Real-Time Measuring Method for Radial Micro-Displacement Measurement on High-Speed Smart Boring Bar

Huanghu Peng,Yijie Wu,Bin Wang,Yizhi Zhang

DOI: https://doi.org/10.1007/s00170-015-7280-2

IF: 3.563

2015-01-01

The International Journal of Advanced Manufacturing Technology

Abstract:This paper presents an improved two-point real-time measuring method for radial micro-displacement measurement on a high-speed smart boring bar, which is applied for high-precision boring of non-cylindrical pinholes on pistons. The two-point measuring scheme consists of two orthogonal displacement sensors and an angle encoder. This method is compared with existing two-point measuring method in mathematical model and calculation process, and results show that the improved method is more simple and efficient. Error analysis and simulations are performed, and experimental results indicate that the improved two-point measuring algorithm has a better real-time performance and ensures the measuring accuracy, which meets the radial micro-displacement real-time closed-loop feedback control requirements for the smart boring bar in high-speed rotation.
Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface

Yuki Shimizu,Yuki Matsuno,Yuan-Liu Chen,Hiraku Matsukuma,Wei Gao

DOI: https://doi.org/10.1007/s41871-018-0007-x

2018-01-01

Abstract:This paper presents a design and testing of a micro-thermal sensor probe for realizing the proposed concept of non-contact surface defect detection, in which a change in heat flow across the gap between the tip of the micro-thermal sensor probe and a target surface is utilized to recognize the existences of surface defects. In the proposed concept of surface defect detection, the probe tip, where the micro-thermal sensor is embedded, is required to be placed as close as possible to the target surface for highly sensitive surface defect detection. For the purpose, an optical tilt detection assembly based on the laser autocollimation is designed to detect relative tilt of the micro-thermal sensor with respect to a target surface. A sensor probe assembly, in which the fabricated micro-thermal sensor is embedded to the tip of a hollow-shaped piezoelectric actuator by using a homemade sensor mount, is also designed in such a way that the sensor element will face to a target surface. A prototype micro-thermal sensor probe is constructed by integrating the optical tilt detection assembly and the sensor probe assembly, and some experiments have been carried out to verify the basic performances of the prototype micro-thermal sensor probe.
On-line Qualification of a Micro Probing System for Precision Length Measurement of Micro-Features on Precision Parts

Yuan-Liu Chen,So Ito,Hirotaka Kikuchi,Ryo Kobayashi,Yuki Shimizu,Wei Gao

DOI: https://doi.org/10.1088/0957-0233/27/7/074008

IF: 2.398

2016-01-01

Measurement Science and Technology

Abstract:This paper presents on-line qualification of the effective diameter of the micro-stylus tip ball of a micro probing system for precision length measurement of micro-features on precision parts by utilizing a set of gauge blocks as the qualification artefact, which is composed by one calibrated gauge block and two supporting gauge blocks that are wrung together for a good mechanical stability. The qualification artefact is aligned side by side with the precision part to be measured for enabling a rapid transfer between the qualification step of the probe two-point tip ball diameter and the length measurement step of the precision part. Based on the proposed setup, on-line qualifications of a micro-stylus with a nominal tip ball diameter of 52.6 μm were carried out by using two methods referred to as Method A and Method B, respectively. Method A is operated by probing the opposite sides of the gap between the two supporting gauge blocks separated by the calibrated gauge block, and Method B is operated by probing the opposite sides of the calibrated gauge block supported by the two supporting gauge blocks. Intensive uncertainty analyses based on the experimental results and the geometrical models were carried out to compare the performances of these two methods. Method A, which was confirmed to be more accurate and faster than Method B, was then employed to measure the width of a micro-gap on a precision part with compensation of the determined effective two-point tip ball diameter.
Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Zhishen Liao,Zhihang Lin,Hui Tang,Bo Liu,Yingjie Jia

DOI: https://doi.org/10.3390/mi15050608

IF: 3.4

2024-05-01

Micromachines

Abstract:This article presents the design, analysis, and prototype testing of a four-degrees-of-freedom (4-DoFs) spatial pose adjustment system (SPAS) that achieves high-precision positioning with 4-DoFs (Z/Tip/Tilt/Θ). The system employs a piezoelectric-driven amplification mechanism that combines a bridge lever hybrid amplification mechanism, a double four-bar guide mechanism, and a multi-level lever symmetric rotation mechanism. By integrating these mechanisms, the system achieves low coupling, high stiffness, and wide stroke range. Analytical modeling and finite element analysis are employed to optimize geometric parameters. A prototype is fabricated, and its performance is verified through testing. The results indicate that the Z-direction feed microstroke is 327.37 μm, the yaw motion angle around the X and Y axes is 3.462 mrad, and the rotation motion angle around the Z axis is 12.684 mrad. The x-axis and y-axis motion magnification ratio can reach 7.43. Closed-loop decoupling control experiments for multiple-input-multiple-outputs (MIMO) systems using inverse kinematics and proportional-integral-derivative feedback controllers were conducted. The results show that the Z-direction positioning accuracy is ±100 nm, the X and Y axis yaw motion accuracy is ±2 μrad, and the Z-axis rotation accuracy is ±25 μrad. Due to the ZTTΘ mechanism, the design proved to be feasible and advantageous, demonstrating its potential for precision machining and micro-nano manipulation.

nanoscience & nanotechnology,instruments & instrumentation,physics, applied,chemistry, analytical
A Miniature Electric Probe with a High Spatial Resolution

Yu Tian,Xing-Chang Wei,Di Wang,Richard Xian-Ke Gao

DOI: https://doi.org/10.1109/tim.2023.3341136

IF: 5.6

2024-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:This article presents a novel design of an ${E}_{z}$ probe with a high spatial resolution. The key factors that have significant impact on spatial resolution are analyzed, and the optimal design for achieving a high spatial resolution is showcased. By strategically reducing the effective lengths of the probe in ${x}$ or ${y}$ -directions, remarkable spatial resolution is achieved. The proposed probe is cost-effective as it is fabricated on a four-layer printed circuit board (PCB) while exhibits more stable performance. To further improve the spatial resolution and address limitations in PCB fabrication, a blind-hole structure is implemented. Operating in a frequency band of up to 6 GHz, the probe demonstrates outstanding rejection of unwanted fields across a broad spectrum. Simulation and measurement results verify the exceptional performance of the proposed probe.
Hybrid vision control apply on automatic pneumatic micromanipulation system

Hung-Yi Chen,Ming-Chang Shih

DOI: https://doi.org/10.1109/ICSENS.2010.5690995

2010-01-01

Abstract:This paper describes an automatic pneumatic micromanipulation system consisting of a servo pneumatic micromanipulator and microscope observation system. In order to acquire an accurate sample, th e probe position with image processing methods is applied to discriminate the sample contour from background. The pneumatic micromanipulator system is an onlinear system, a hybrid vis ion con troller is designed to control the position of the pneumatic micromanipulator and the motion of the micromanipulation system by microscope with a 1/2 type CCD image device. Experimental results shows the steady state errors remain within ± 1 pixel, and the automatic sample puncturing is successful.
Maximum Acceptable Tilt Angle for Point Autofocus Microscopy

Huixu Song,Qingwei Li,Zhaoyao Shi

DOI: https://doi.org/10.3390/s23249655

IF: 3.9

2023-12-07

Sensors

Abstract:The complete and accurate acquisition of geometric information forms the bedrock of maintaining high-end instrument performance and monitoring product quality. It is also a prerequisite for achieving the 'precision' and 'intelligence' that the manufacturing industry aspires to achieve. Industrial microscopes, known for their high accuracy and resolution, have become invaluable tools in the precision measurement of small components. However, these industrial microscopes often struggle to demonstrate their advantages when dealing with complex shapes or large tilt angles. This paper introduces a ray-tracing model for point autofocus microscopy, and it provides the quantified relationship formula between the maximum acceptable tilt angle and the beam offset accepted in point autofocus microscopy, then analyzing the maximum acceptable tilt angle of the objects being measured. This novel approach uses the geometric features of a high-precision reference sphere to simulate the tilt angle and displacement of the surface under investigation. The research findings show that the maximum acceptable tilt angles of a point autofocus microscope vary across different measured directions. Additionally, the extent to which the maximum acceptable tilt angles are affected by the distances of the beam offset also varies. Finally, the difference between the experiment results and the theoretical results is less than 0.5°.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Mechanics of Tunable Hemispherical Electronic Eye Camera Systems That Combine Rigid Device Elements with Soft Elastomers

Chaofeng Lu,Ming Li,Jianliang Xiao,Inhwa Jung,Jian Wu,Yonggang Huang,Keh-Chih Hwang,John A. Rogers

DOI: https://doi.org/10.1115/1.4023962

2013-01-01

Journal of Applied Mechanics

Abstract:A tunable hemispherical imaging system with zoom capability was recently developed by exploiting heterogeneous integration of rigid silicon photodetectors on soft, elastomeric supports, in designs that can facilitate tunable curvature for both the lens and detector. This paper reports analytical mechanics models for the soft materials aspects of the tunable lenses and detector surfaces used in such devices. The results provide analytical expressions for the strain distributions, apex heights and detector positions, and have been validated by the experiments and finite element analysis. More broadly, they represent important design tools for advanced cameras that combine hard and soft materials into nonplanar layouts with adjustable geometries.
Tilt-related alignment issues in miniature micromechanical on-wafer electrical probes composed of multiple flexible microcantilevers

Steve Arscott

DOI: https://doi.org/10.1088/2631-8695/ad2ccc

IF: 1.7

2024-02-25

Engineering Research Express

Abstract:Some new issues concerning the contacting and positioning of small electrical microelectromechanical systems (MEMS) probes based on multiple, flexible microcantilevers are presented here. A tilt error, associated with the lateral probe roll, means that contact touchdown occurs sequentially in different cantilevers upon increasing probe overtravel. To understand the relationship between probe overtravel, tip skate, tip planarity, tip tangency, and contact force in the different contacts, the relationship between mechanical bending and torsion of the flexible cantilevers needs to be accounted for. The study reveals the conditions for achieving contact planarity and desired contact force, as well as the identification of a new 'differential skate error' contact misalignment associated with such MEMS probes based on multiple, flexible microcantilevers. This misalignment leads to a 'differential contact force error' which has implications for electrical contact quality. An experimental scale model probe based on three cantilevers is used to test the modelling—the results agree well with the predictions of the model. Interestingly, the experiments revealed an effect not accounted for in the modelling; this 'twist error' resulted in the cantilever lead edge not being parallel to the touchdown plane. The findings may be useful for engineers involved with the automatic control positioning of such emerging miniature probes, especially in terms of the impact of probe positioning errors.
A New Centering Method of the Measuring Probe for Spiral Scanning-Based Surface Profile Measurement Systems

Hui-Lin Du,Pei-Yang Zeng,Bing-Feng Ju,Zhao-Zhong Zhou,Shaoning Xu,Anyu Sun

DOI: https://doi.org/10.1088/1361-6501/aa512b

2016-01-01

Abstract:Spiral scanning is a high-efficiency scanning mode for surface profile measurement systems. The most important priority to realize the spiral scanning mode is to accurately align the measuring probe with the rotational centre of the spindle. This paper proposes a novel centre alignment method of the measuring probe, which is considered to be suitable for any type of spiral scanning surface measurement systems. The proposed method, which only needs a tilted flat mirror as the artefact, makes the time-consuming centre alignment process of the measuring probe become much easier and faster. The operational steps of the proposed method are presented. Experiments have also been carried out based on a self-developed optical profiler with spiral scanning operation to verity the feasibility of the proposed method. The experimental results show that the proposed method is capable of conducting a fast alignment (only takes 3 min) while maintaining a high alignment accuracy. Evaluation of the alignment accuracy shows that the centering error is less than 10 mu m on the mechanical guide rail stage and about 1.7 mu m on the air-bearing stage.
Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System

Zhiyi Wang,Tingyu Wang,Yongqiang Yang,Yukai Yang,Xiaotao Mi,Jianli Wang

DOI: https://doi.org/10.3390/s22186794

IF: 3.9

2022-09-09

Sensors

Abstract:To improve the accuracy of three-dimensional (3D) surface contour measurements of freeform optics, a two-dimensional (2D) tilt measurement sensor for confocal microscopy (CM) systems is proposed based on a double-cylindrical mirror structure. First, the proposed system is accurately modeled. Second, we introduce a modified mean–shift-based peak-extraction algorithm with a novel kernel function (MSN) because the reflectivity of the measured object and fluctuation of the light source affect the measurement accuracy. Third, a partition fitting (PF) strategy is proposed to reduce the fitting error and improve the measurement accuracy. Simulations and experiments reveal that the robustness, speed, and angular prediction accuracy of the system effectively improved as a function of MSN and PF. The developed sensor can measure the 2D tilt, where each tilt is a composition of two separate dimensions, and the mean prediction errors in the 2D plane from −10°–+10° are 0.0134° (0.067% full scale (F.S)) and 0.0142° (0.071% F.S). The sensor enables the optical probe of a traditional CM to obtain accurate and simultaneous estimates of the 2D inclination angle and spatial position coordinates of the measured surface. The proposed sensor has potential in 3D topographic reconstruction and dynamic sampling rate optimization for 3D contour detection.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Development of a High-Precision Multifunctional Probe for Measuring Microstructures

Rui-Jun Li,Jie Zheng,Kai Kang,Xiao-Yu Cai,Biao Wang,Qiao-Sheng Pan,Kuang-Chao Fan

DOI: https://doi.org/10.1109/jsen.2021.3054965

IF: 4.3

2021-04-01

IEEE Sensors Journal

Abstract:An increasing number of micro/nano-components with complex structures have emerged in recent years. Different kinds of feature sizes usually exist in a single component and require the use of instruments with nanometer-level accuracy. The traditional types of equipment cannot meet the current demands because of their lack of function and effectiveness. In this study, a multifunctional probe is designed by combining the interference and focusing principles. The Linnik principle is adopted in the interferometry module for its high vertical resolution and large horizontal range and its ability to measure surface topography. The focusing module modified from a Blue-ray DVD pickup head has a high horizontal resolution and a large vertical range suitable for measuring step height and line/groove width. The two modules share a polarizing beam splitter and an objective lens to reduce probe size. Then, the probe is manufactured, calibrated, and verified by measuring the surface topography with a reference height of 100 nm, a step height of approximately $4~mu text{m}$ , and a diameter of approximately $25~mu text{m}$ . The proposed probe has a high resolution and large range in 3D and can measure high-precision components with multiple features.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Nanoprecision Measurement of High-Aspect-Ratio Microholes Using Sub-100-μm Tungsten Ball Tip

Ya-Xiong He,Rong-Wei Lin,Jie Li,Rui-Jun Li,Pan Yao,Zhen-Ying Cheng,Qiang-Xian Huang,Kuang-Chao Fan

DOI: https://doi.org/10.1109/jsen.2023.3330394

IF: 4.3

2023-12-16

IEEE Sensors Journal

Abstract:Microholes with diameters less than and aspect ratios larger than 5:1 are widely used in industrial production. To measure the inner wall of these structures with nanometer accuracy, this study proposed and implemented a method using a self-developed micro coordinate-measuring machine equipped with a tungsten probe stylus. The probe stylus has a sphere diameter of approximately , which makes it suitable for vertical insertion into the microholes. The self-fabricated tungsten probe tip's radius error was measured and corrected using a ruby standard sphere. The tungsten probe stylus was fixed to the probe's elastic mechanism and then inserted into the microhole's interior through a vision-aided guidance system. Eight points uniformly distributed on the cross Section at different heights were measured, and the coordinates of the points were fit into a circular equation using the least-squares method. The measured diameter and roundness error were obtained from the fit equations. The experimental results show that the measurement uncertainties of the diameter and roundness error measurement are 192 and 226 nm ( = 2), respectively. This method can provide nanometer accurate measurements of the internal dimensions of microholes and microgrooves, as well as the dimensional and morphological characteristics of their inner walls. Equipped with a needle-tip probe, it can also be used to measure the roughness of the inner wall of microstructures.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Interference-enhanced micro-vision-based single-shot imaging of five degrees-of-freedom error motions for ultra-precision rotary axes

Jie Yang,Dingkun Meng,Rongjing Zhou,Peng Huang,Suet To,Li-Min Zhu,Zhiwei Zhu

DOI: https://doi.org/10.1016/j.ijmachtools.2024.104184

IF: 10.331

2024-07-13

International Journal of Machine Tools and Manufacture

Abstract:The measurement of five degrees-of-freedom (5-DOF) error motions, including radial, axial, and tilt motions, is crucial for ultra-precision rotary axes, which are key components of ultra-precision machine tools and instrumentation. In this study, we propose an interference-enhanced micro-vision technique to concurrently derive the 5-DOF error motions from a single-shot two-dimensional image, which was captured by a standard industrial camera equipped with an interference objective lens. By consolidating the essential features into a single optical path, the interference-enhanced micro-vision technique ingeniously merges machine micro-vision and modified white-light interference to detect in-plane and out-of-plane motions. Numerical simulations demonstrated, the basic principle for deriving the 5-DOF error motions, and the magnification of objective lens had inconsistent effects on the measurement accuracy for the radial and tilt motions, i.e. higher magnification led to higher radial accuracy but lower tilt accuracy. As practical application, the error motion detection capability was demonstrated by simultaneously measuring the 5-DOF synchronous and asynchronous error motions for a typical air bearing spindle at rotation speeds of 8.33, 108.33, and 308.33 rpm. The synchronous errors were nearly identical at various spindle speeds. However, because of system dynamics, increased vibrations were observed to be superimposed on the basic tilt error motions as the spindle speeds increased, which were verified by the vibration marks imprinted on the turned surfaces. For the 5-DOF motion measurements, the least-square fitting using large-volume edge and greyscale data of the captured image enabled super-high resolutions, despite using a camera with a relatively large pixel size and low bit depth. These results demonstrate that the proposed interference-enhanced micro-vision technique is a simple and effective tool for measuring spatial error motions in ultra-precision rotary axes.

engineering, mechanical, manufacturing
High-precision compliant mechanism for lens XY micro-adjustment.

Yanfeng Qiao,Xinfeng Yu,Lei Zhao,Pengzhi Li

DOI: https://doi.org/10.1063/1.5141138

IF: 1.6

2020-03-01

Review of Scientific Instruments

Abstract:The high resolution of lithography lenses has led to a requirement for high-precision lens-adjusting compensators. This paper presents the design, analysis, and testing of a high-precision two-degrees-of-freedom compliant mechanism to be used for lens XY micro-adjustment. The monolithic mechanism, which is based on a 1RR-2RRR configuration, uses flexure hinges to connect the movable inner ring with the fixed outer ring. The apparatus is driven using two piezoelectric actuators, and the lens terminal displacement is fed back in real time using two capacitive sensors. This paper describes the principle of the mechanism. Simulations and experiments are then performed to evaluate the system. The results show that the strokes along both the x-axis and the y-axis exceed ±25 µm. The accuracy of the proposed mechanism is better than ±7 nm. The root-mean-square induced figure error is better than 0.051 nm. The coupling z and tip/tilt rigid motions are less than 50 nm and 220 mas, respectively. The first natural frequency of the mechanism is 212 Hz. These results indicate that the mechanism has advantages that include high accuracy, low coupling errors, high rigidity, and compactness and that it will act as an efficient compensator for lithography lenses.

Engineering,Medicine,Materials Science,Physics

Method of micro hole tilt adjustment based on a vision-guided touch probe

Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner

Self-Calibration Vision Method and System for Automatically Moving CMM Stylus Into Micro Holes

Method of inclined hole axis adjustment based on geometric optimization and minimum zone theory

Arbitrary Manipulation of Micro-Particles in Three Dimensions by Steering of Multiple Orbital Angular Momentum Modes

Non-cylinder Holes Precision Machining by Giant Magnetostrictive Components with Sliding Mode Control

An Improved Two-Point Real-Time Measuring Method for Radial Micro-Displacement Measurement on High-Speed Smart Boring Bar

Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface

On-line Qualification of a Micro Probing System for Precision Length Measurement of Micro-Features on Precision Parts

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

A Miniature Electric Probe with a High Spatial Resolution

Hybrid vision control apply on automatic pneumatic micromanipulation system

Maximum Acceptable Tilt Angle for Point Autofocus Microscopy

Mechanics of Tunable Hemispherical Electronic Eye Camera Systems That Combine Rigid Device Elements with Soft Elastomers

Tilt-related alignment issues in miniature micromechanical on-wafer electrical probes composed of multiple flexible microcantilevers

A New Centering Method of the Measuring Probe for Spiral Scanning-Based Surface Profile Measurement Systems

Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System

Development of a High-Precision Multifunctional Probe for Measuring Microstructures

Nanoprecision Measurement of High-Aspect-Ratio Microholes Using Sub-100-μm Tungsten Ball Tip

Interference-enhanced micro-vision-based single-shot imaging of five degrees-of-freedom error motions for ultra-precision rotary axes

High-precision compliant mechanism for lens XY micro-adjustment.