Abstract:As a rapid and efficient processing technology, CO2 laser processing has been applied to remove fused silica materials. However, thermal effect caused by CO2 laser would lead to thermal modification layer, thermal deformation and residual stress in processed fused silica optics. To reduce the thermal effect, high power and short pulse CO2 laser is applied to remove the surface material of fused silica. In this work, a model coupling the physical processes of heat transfer and phase transition was established to simulate the complex interaction of CO2 laser with fused silica. Then, the model was applied to investigate the evolutions of temperature distribution and surface morphology involved in the laser ablating and melting processes. The results indicate that with the increase of laser power and decrease of pulse width, positive effect would take place that the radius-depth ratio of ablating area increases and the heat-affected area becomes smaller. For the application of CO2 laser with 0.2 mu s pulse width and 800 kW peak power, fused silica material would quickly reach the ablation state. The ablation depth is less than 1 pm, and the thickness of heat-affected area is about 80 nm. It means that the high power and short pulse CO2 laser is equivalent to a hot grinding ball head, which can remove the material rapidly with small heat-affected area on fused silica surface. The simulation results of line scanning processing with CO2 laser were finally compared with the experiment ones, which verified the feasibility of the established model. The suggestions and prospective for improving the model were put forward as well.

Thermal transport in CO2 laser irradiated fused silica: In situ measurements and analysis

Irradiation Effects of CO2laser Parameters on Surface Morphology of Fused Silica

Thermal Analysis of Laser Irradiation of Fused Silica

Coupled Thermal-Mechanical Analysis of CO<sub>2</sub> Laser Irradiation on Fused Silica

Thermal Analysis of Multi-Pass Laser Irradiation on Fused Silica

Quantitative Measurement of CO2laser-induced Residual Stress in Fused Silica Optics

Characteristics of laser-densified and conventionally heat treated sol–gel derived silica–titania films

Toward Little Heat-Affected Area of Fused Silica Materials Using Short Pulse and High Power CO2 Laser

Surface Evolution and Laser Damage Resistance of CO2 Laser Irradiated Area of Fused Silica

The Photo-Thermal Absorbing Influence on Introducing Laser-Damaging of the Fused Silica

Numerical Simulation of Thermal Effect in Fused Silica Irradiated by Nanosecond High Repetition Rate Laser

Evolution Regularity of Continuous Surface Structures Shaped by Laser-Supported Fictive-Temperature Modifying

Theoretical and Experimental Investigations of Localized CO2 Laser-Fused Silica Interactions and Thermo-Mechanical Properties of Mitigated Sites

Theoretical and experimental investigations in thermo-mechanical properties of fused silica with pulsed CO2 laser ablation

The Structure Evolution of Fused Silica Induced by CO 2 Laser Irradiation

The Influence of Co2 Laser Local Irradiation on the Laser Damage Resistance of Fused Silica

Time-resolved Temperature Measurement and Numerical Simulation of Millisecond Laser Irradiated Silicon

Interaction Between the Mid-Infrared Continuous Wave Laser with a Center Wavelength of 3.8 Μm and Fused Silica.

Role of Fictive Temperature Distribution Involved in CO2 Laser Polishing of Fused Silica and Its Optimization for Achieving Even Heat-Affected Zones

Ultrafast heat transfer dynamics induced by femtosecond laser pulse in fused silica

Localized Co2 Laser Treatment and Post-Heating Process to Reduce the Growth Coefficient of Fused Silica Surface Damage