Abstract:Fused silica optics, as key components in high - power laser systems, are prone to be damaged under short - pulse ultraviolet (UV) laser irradiation. CO 2 laser is usually used to repair the laser damage and extend the service life of optics. However, the anti - laser damage characteristics of repaired substrates sometimes can't meet the expectation. To facilitate better application of CO 2 laser repairing method, this work studied the CO 2 laser irradiating mechanism of fused silica in detail and investigated the damage characteristics of repaired optical surface through experiments. Firstly, finite element level - set (FELS) method is adopted to simulate CO 2 laser irradiating process. The simulation showed that CO 2 laser irradiation would cause molten material migration, vapor material deposition and affect the formation of residual stress. Various tests of morphology, residual stress, and photo - thermal absorption were conducted to study the changes of laser damage characteristics of repaired craters. The experimental results presented that molten materials migration and vapor materials re deposition occurred in CO 2 laser irradiation, which would promote the formation of residual stress, cause stronger laser absorption, or even induce laser damage. Through the experiment, accuracy of simulation was verified further. In this work, the CO 2 laser repairing mechanism of fused silica and laser damage characteristics of repaired optics are clarified through FELS simulation and experiments. Relative results can provide a certain technical support for the performance improvement of repaired fused silica optics.

The Influence of Co2 Laser Local Irradiation on the Laser Damage Resistance of Fused Silica

Effects of CO2 Laser Irradiation on Surface Morphology and Stress Distribution of Fused Silica

The Structure Evolution of Fused Silica Induced by CO 2 Laser Irradiation

Effect of residual stress on laser-induced damage characterization of mitigated damage sites in fused silica

Damage Growth Characteristics on the Exit Surface of Fused Silica by the Low-Temporal Coherence Light Irradiation.

Effects of annealing parameters on transmission wavefront and damage threshold of fused silica

Surface Evolution and Laser Damage Resistance of CO2 Laser Irradiated Area of Fused Silica

Coupled Thermal-Mechanical Analysis of CO<sub>2</sub> Laser Irradiation on Fused Silica

Evolution of Intrinsic Defects and Ring Structures on the Surface of Fused Silica Optics after CO2 Laser Conditioning.

Irradiation Effects of CO2laser Parameters on Surface Morphology of Fused Silica

Material migration and damage characteristics of fused silica optical surface treated by CO 2 laser/short – pulse ultraviolet laser

Two Localized Co2 Laser Treatment Methods for Mitigation of Uv Damage Growth in Fused Silica

Investigation on the influence of the CO2 laser parameters on the defect healing process of fused silica

Theoretical and Experimental Investigations of Localized CO2 Laser-Fused Silica Interactions and Thermo-Mechanical Properties of Mitigated Sites

Evolution of Point Defects in Mechanical Cracks of Fused Silica after CO2 Laser Melting

Laser Induced Damage in Fused Silica for 248 nm

Laser Induced Damage Characteristics of Fused Silica Optics Treated by Wet Chemical Processes

Localized Co2 Laser Treatment and Post-Heating Process to Reduce the Growth Coefficient of Fused Silica Surface Damage

Effect of laser ablation on the conductivity and laser-induced damage threshold of fused silica components

Characterization of 355 Nm Laser-Induced Damage of Mitigated Damage Sites in Fused Silica

Thermal Analysis of Laser Irradiation of Fused Silica