Calibrations for Millimeter-Wave Silicon Transistor Characterization
Dylan F. Williams,Phillip Corson,Jahnavi Sharma,Harish Krishnaswamy,Wei Tai,Zacharias George,David S. Ricketts,Paul M. Watson,Eric Dacquay,Sorin P. Voinigescu
DOI: https://doi.org/10.1109/tmtt.2014.2300839
IF: 4.3
2014-03-01
IEEE Transactions on Microwave Theory and Techniques
Abstract:This paper compares on-wafer thru-reflect-line (TRL) and off-wafer short-open-load-thru (SOLT) and line-reflect-reflect-match (LRRM) vector-network-analyzer probe-tip calibrations for amplifier characterization and parasitic-extraction calibrations for transistor characterization on silicon integrated circuits at millimeter-wave frequencies. We show that on-wafer calibrations generally outperform off-wafer and LRRM probe-tip calibrations at millimeter-wave frequencies. However, certain parasitic-extraction algorithms designed specifically to remove contact pads, transmission-lines, and access vias correct for much of the error in off-wafer calibrations.
engineering, electrical & electronic