Abstract:In recent years, research has begun to focus on the development of non-resonant elliptical vibration-assisted cutting (EVC) devices, because this technique offers good flexibility in manufacturing a wide range of periodic microstructures with different wavelengths and heights. However, existing non-resonant EVC devices for diamond turning can only operate at relatively low frequencies, which limits their machining efficiencies and attainable microstructures. This paper concerns the design and performance analysis of a non-resonant EVC device to overcome the challenge of low operational frequency. The structural design of the non-resonant EVC device was proposed, adopting the leaf spring flexure hinge (LSFH) and notch hinge prismatic joint (NHPJ) to mitigate the cross-axis coupling of the reciprocating displacements of the diamond tool and to combine them into an elliptical trajectory. Finite element analysis (FEA) using the mapped meshing method was performed to assist the determination of the key dimensional parameters of the flexure hinges in achieving high operational frequency while considering the cross-axis coupling and modal characteristics. The impact of the thickness of the LSFH on the sequence of the vibrational mode shape for the non-resonant EVC device was also quantitatively revealed in this study. Moreover, a reduction in the thickness of the LSFH can reduce the natural frequency of the non-resonant EVC device, thereby influencing the upper limit of its operational frequency. It was also found that a decrease in the neck thickness of the NHPJ can reduce the coupling ratio. Experimental tests were conducted to systematically evaluate the heat generation, cross-axis coupling, modal characteristics and diamond tool’s elliptical trajectory of a prototype of the designed device. The test results showed that it could operate at a high frequency of up to 5 kHz. The cross-axis coupling ratio and heat generation of the prototype are both at an acceptable level. The machining flexibility and accuracy of the device in generating microstructures of different wavelengths and heights through tuning operational frequency and input voltage have also been demonstrated via manufacturing the micro-dimple arrays and two-tier microstructured surfaces. High-precision microstructures were obtained with 1.26% and 10.67% machining errors in wavelength and height, respectively.

Fabrication of three-dimensional sin-shaped ripples using a multi-tip diamond tool based on the force modulation approach

Fabrication of Periodic Nanostructure Using a Multi-Tip Diamond Tool: Depth Prediction and Material Removal Mechanism

Controllable Diamond Cutting of Structured Surfaces with Subnanometric Height Features on Silicon

Fabrication of Sinusoidal-Shaped Multi-Tip Diamond Tools by a Focused Ion Beam Machining Process

Auto-tracking Single Point Diamond Cutting on Non-Planar Brittle Material Substrates by a High-Rigidity Force Controlled Fast Tool Servo

0706 Uctile Cutting of a Microstructure Array on Silicon Surface by Using a Diamond Tool with a Negative Rake Angle

A New Diamond Machining Approach for Extendable Fabrication of Micro-Freeform Lens Array

Molecular Dynamics Simulations of Ripple Nanostructure Formation During Nanomachining Via Atomic Force Microscopy

Systematic Modeling and Rapid Control for Diamond Machining of Periodical Optical Surface

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

Fabrication of Sinusoidal Microstructures on Curved Copper Surface by Ultra-Precision Diamond Cutting with a Rotary <i>B</i>-Axis and Fast Tool Servo System

Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Force Servo Nano-Precision Diamond Cutting of Freeform Surfaces on a Micro-Precision Machine

Controlled Nanodot Fabrication by Rippling Polycarbonate Surface Using an AFM Diamond Tip.

Generation mechanism and dual-dynamics simulation of surface patterns in single-point diamond turning of single-crystal copper

Study on the fabrication of micro-textured end face in one-dimensional ultrasonic vibration–assisted turning

Fabrication and characterization of controllable micro wavy pattern on cylindrical surface using ultra-precision diamond turning system

AFM tip-based mechanical nanomachining of 3D micro and nano-structures via the control of the scratching trajectory

Machining complex three-dimensional nanostructures with an atomic force microscope through the frequency control of the tip reciprocating motions

Diamond micro-scraping for the fabrication of polygonal Fresnel lens structure array on roller molds

A High-Frequency Non-Resonant Elliptical Vibration-Assisted Cutting Device for Diamond Turning Microstructured Surfaces