Fabrication of infrared hexagonal microlens array by novel diamond turning method and precision glass molding
Lin Zhang,Neil J Naples,Wenchen Zhou,Allen Y Yi
DOI: https://doi.org/10.1088/1361-6439/ab10ff
2019-04-24
Journal of Micromechanics and Microengineering
Abstract:Single-point diamond turning assisted with slow/fast tool servo is a viable technique for complexmicrolens arrays manufacturing. However, there are still challenges one must overcome whenefficiently fabricating microlens arrays with discontinuous features. In this study, a novelslow-tool-servo diamond turning method, termed toroid-surface-based slow tool servo turning method,was proposed for generation of discontinuously structured microlens arrays. A discussion on theadvantages for processing discontinuous features was presented and a hexagonal spherical microlensarray over a large area was fabricated using the proposed method. This toolpath generation strategy,combined with a segmented turning approach, was adopted with consideration of both the geometry ofthe diamond tool and the profile of the microlens array. The surface roughness, form accuracy andgeometry periodicity, were investigated. Results indicated that the entire microlens array has highhomogeneous qualit...
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied