Abstract:Superior plasticity of monoclinic beta‐phase gallium oxide β‐Ga2O3 single crystals is observed for micropillar diameters <500 nm due to lateral deconfinement and low crystal symmetry. The ultra‐high plasticity of this eminently brittle material is desirable for flexible electronic device applications. The observed superior plasticity opens opportunities to further study and leverage semiconductors with low symmetry crystal structures. Bulk‐scale (2 ̄ 01)‐oriented monoclinic beta‐phase gallium oxide (β‐Ga2O3) single crystals are brittle and fracture at low compressive strains. Here, it is reported that submicron β‐Ga2O3 pillars exhibit an exceptional room temperature plastic strain of up to ≈22% under compression. Deformation is observed in transition from brittle to superior plasticity with reduction of pillar size. The critical diameter for the brittle to ductile transition is ≈800 nm, attributed to the initiation of dislocation slip on the primary (400) slip planes. Below 500 nm, a second transition is reported to superior plastic deformation, achieved through the activation of secondary mechanisms due to both deconfinement and low crystalline symmetry of β‐Ga2O3, differentiating this finding from size‐effected plasticity of other brittle materials where plasticity is attributed to dislocation slip on primary slip planes. Molecular dynamics simulation supports the proposed mechanism of pillar deconfinement where plastic deformation in larger pillars is solely dominated by planar defects on (400) slip planes, while secondary defects are induced for sufficiently small pillars. No plasticity is observed for equally dimensioned pillars tested on a (010)‐oriented surface, highlighting the importance of presenting crystallography on submicron plasticity in this material.

Deformation and fracture behaviors of monocrystalline β-Ga 2 O 3 characterized using indentation method and first-principles calculations

The Anisotropy of Deformation Behaviors in (100) and (010) Plane of Monoclinic Β-Ga2o3 Single Crystals

Abrasive machining induced surface layer damage behavior and formation mechanism of monocrystalline β-Ga 2 O 3 : A comparative study of nanoindentation and nanogrinding

The Anisotropy of Deformation Behaviors in (100) and (010) Plane of Monoclinic 8-Ga2o3 Single Crystals

The anisotropy dependence of deformation mechanism of cleavage planes in β-Ga2O3 single crystal

Enhancing the Mechanical Strength Ofβ-Ga2o3 with Al Alloying

Oxygen-close-packed (310)-Plane Substrates of Β-Ga2o3 Grown by the Casting Method

Fracture Toughness and Critical Thickness of β-(InxGa1-x)2O3 / Ga2O3 by First Principles

Deformation patterns and fracture stress of beta-phase gallium oxide single crystal obtained using compression of micro-pillars

Unusual Deformation and Fracture in Gallium Telluride Multilayers

Superior Room Temperature Compressive Plasticity of Submicron Beta‐Phase Gallium Oxide Single Crystals

Orientation-dependent surface radiation damage in $β$-Ga2O3 explored by multiscale atomic simulations

Investigation of Deformation and Fracture Mechanisms in Two-dimensional Gallium Telluride Multilayers Using Nanoindentation

Experimental investigation on axial ultrasonic-assisted grinding of different crystal surfaces of single-crystal gallium oxide

Investigation on β-Ga2O3 (101) plane with high-density surface dangling bonds

Growth and characterization of the β-Ga 2 O 3 (011) plane without line-shaped defects

Orientation-dependent atomic-scale mechanism and defect evolution in β-Ga2O3 thin film epitaxial growth

Ultra‐Large Compressive Plasticity of E‐Ga 2 O 3 Thin Films at the Submicron Scale

Anisotropy mechanical behavior of crystals based on gallium arsenide cleavage processing

Assessment of the (010) $β$-Ga$_2$O$_3$ Surface and Substrate Specification

Deformation and removal mechanism of single crystal gallium nitride in nanoscratching